SEMI E134 - Specification for Data Collection Management -

Abstract

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1  Purpose
1.1  This Specification describes a method for data acquisition EDA Applications to request process and data from equipment to be communicated in an automated fashion by the equipment, or in an ad hoc request from the EDA Application. It includes a mechanism for organizing related data into groups to make it more straightforward for enabling or disabling a large number of data sources, and to allow EDA Applications to organize related data into groups according to their purpose.
2  Scope
2.1  This Specification provides a means to acquire event, exception, and trace data from semiconductor equipment through the use of a named data collection plan. This Specification defines what form a data collection plan takes, the meaning of its contents, and an interface for managing them that is to be supported by the equipment.
2.2  This Specification defines the behavior associated with the execution of data collection plans in the form of finite state machines. The formats for data produced as a result of executing a data collection plan are also defined, as is the interface that shall be supported by an EDA Application of data collection plan output.
2.3  This Specification defines a way for the equipment to notify users when the combination of activities on the equipment, including data acquisition, is causing the equipment to perform below supplier-defined criteria.
2.4  This Specification defines a way for users to make ad hoc, on demand requests for data from the equipment, outside of a data collection plan.
NOTICE: SEMI Standards and Safety Guidelines do not purport to address all safety issues associated with their use. It is the responsibility of the users of the Documents to establish appropriate safety and health practices, and determine the applicability of regulatory or other limitations prior to use.

Subordinate Standards (included)
SEMI E134.1-0414 — Specification for SOAP Binding of Data Collection Management (DCM)
SEMI E134.2-1225 — Specification for Protocol Buffers of Data Collection Management

Referenced SEMI Standards (purchase separately)
SEMI E5 — Specification for SEMI Equipment Communications Standard 2 Message Content (SECS-II)
SEMI E30 — Specification for the Generic Model for Communications and Control of Manufacturing Equipment (GEM)
SEMI E39 — Specification for Object Services: Concepts, Behavior, and Services
SEMI E40 — Specification for Processing Management
SEMI E94 — Specification for Control Job Management
SEMI E120 — Specification for the Common Equipment Model (CEM)
SEMI E125 — Specification for Equipment Self Description (EqSD)
SEMI E132 — Specification for Equipment Client Authentication and Authorization
NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.

Revision History
SEMI E134-1225 (technical revision)
SEMI E134-1224 (technical revision)
SEMI E134-0924 (technical revision)
SEMI E134-0624 (technical revision)
SEMI E134-0923 (technical revision)
SEMI E134-1022 (technical revision)
SEMI E134-0319 (technical revision)
SEMI E134-0813 (technical revision)
SEMI E134-0313 (technical revision)
SEMI E134-0710 (technical revision)
SEMI E134-0310 (designation update)
SEMI E134-0709E (editorial revision)
SEMI E134-0709 (technical revision)
SEMI E134-0308 (designation update)
SEMI E134-0307 (designation update)
SEMI E134-1105 (technical revision)
SEMI E134-0305 (designation update)
SEMI E134-1104E (editorial revision)
SEMI E134-0704 (first published)

SEMI E134.1-0414 (technical revision)
SEMI E134.1-0813 (technical revision)
SEMI E134.1-0313 (technical revision)
SEMI E134.1-0710 (technical revision)
SEMI E134.1-0310 (technical revision)
SEMI E134.1-0709 (technical revision)
SEMI E134.1-0308 (technical revision)
SEMI E134.1-0307 (technical revision)
SEMI E134.1-1105 (technical revision)
SEMI E134.1-0305 (first published)

SEMI E134.2-1225 (technical revision)
SEMI E134.2-1224 (technical revision)
SEMI E134.2-0924 (technical revision)
SEMI E134.2-0923 (technical revision)
SEMI E134.2-1022 (first published)

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