E13600 - SEMI E136 - Test Method for Determining the Output Power of RF Generators Used in Semiconductor Processing Equipment RF Power Delivery Systems
NOTICE: This Standard was completely rewritten in 2021.
The purpose of this Test Method is to provide an accurate method for measuring the output power of radio frequency (RF) generators used in RF power delivery systems of semiconductor processing equipment.
This Test Method is referred to as a preferred method of RF power measurement for conforming to SEMI E113.
This Test Method specifies the testing procedures and test equipment required for determining the true RF output power (i.e., heating power) of RF generators.
This Test Method uses a calorimetric power meter, which was calibrated previously using precise low-frequency substitution techniques as a reference standard.
This Test Method also describes use of a transfer sensor that is calibrated using a calorimeter and a working sensor that is calibrated using the transfer sensor.
Referenced SEMI Standards (purchase separately)
SEMI C41 — Specification and Guide for 2-Propanol
SEMI E113 — Specification for Semiconductor Processing Equipment RF Power Delivery Systems
SEMI E136-1104 (Reapproved 0518)
SEMI E136-1104 (Reapproved 0512)
SEMI E136-1104 (first published)
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