SEMI E136 - Test Method for Determining the Output Power of RF Generators Used in Semiconductor Processing Equipment RF Power Delivery Systems
This Standard was technically approved by the Metrics Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 13, 2017. Available at www.semiviews.org and www.semi.org in May 2018; originally published November 2004; previously published May 2012.
The purpose of this Test Method is to provide an accurate method for measuring the output power of radio frequency (RF) generators used in RF power delivery systems for semiconductor processing equipment to support SEMI E113.
This Test Method specifies the testing procedures and test equipment required for determining the true output power (i.e., heating power) output of RF generators. This Test Method uses a calorimetric power meter, which was calibrated previously using precise DC substitution techniques as a reference standard.
The primary focus for this Test Method is semiconductor processing equipment including, but not limited to, the following equipment types:
• Dry etch equipment, and
• Film deposition equipment (chemical vapor deposition [CVD] and physical vapor deposition [PVD]).
Referenced SEMI Standards
SEMI E113 — Specification for Semiconductor Processing Equipment RF Power Delivery Systems
SEMI E114 — Test Method for RF Cable Assemblies Used in Semiconductor Processing Equipment RF Power Delivery Systems