SEMI E137 - 半導体製造装置の最終組立,梱包,輸送,開梱,クリーンルームの製造領域への移送のためのガイド -

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Volume(s): Equipment Automation Hardware
Language: Japanese
Type: Single Standards Download (.pdf)
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Revision: SEMI E137-0705 (Reapproved 1111) - Superseded



本スタンダードは,global Gases Technical Committeeで技術的に承認されている。現版は2011912日,global Audits and Reviews Subcommitteeにて発行が承認された。201111月にwww.semiviews.orgおよび www.semi.orgで入手可能となる。初版は200411月発行。前版は20056月発行。


注意: 本文書は,編集上の修正を伴い,再承認された。






Referenced SEMI Standards

SEMI C41 — Specifications and Guidelines for 2-Propanol

SEMI E49.2 — Guideline for the Qualification of Polymer Assemblies Used in Ultrapure Water and Liquid Chemical Systems in Semiconductor Process Equipment

SEMI F63 — Guide for Ultrapure Water Used in Semiconductor Processing

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