SEMI E137 - Guide for Final Assembly, Packing, Transportation, Unpacking, and Moving of Semiconductor Manufacturing Equipment -

Abstract

1 Purpose
1.1 The objective of this Guide is to establish standard guidance for activities specific to the final assembly and packing at the supplier’s facility, transportation, unpacking, and moving to the user’s cleanroom of semiconductor manufacturing equipment (SME).
NOTE 1: As with any SEMI Guide, the practices outlined herein are recommendations, not specifications. Users of this Guide should recognize that alternate practices are not excluded. It is recommended that, in considering alternatives to what this Guide recommends, one consider whether the alternatives produce results that are equivalent to those produced using the recommendations outlined here and whether the alternatives meet the requirements of the end user.
2 Scope
2.1 This is a Guide for final assembly and packing of SME at the supplier’s facility through moving of SME from the user’s loading dock/receiving area to its cleanroom manufacturing area.
2.2 This Guide includes transportation from the supplier’s shipping dock to the user’s receiving dock.
2.3 This Guide applies to cargo shipped from suppliers on pallets, regardless of its mass.
2.4 This Guide applies to SME more than 100 kg (220 lb), regardless of how it is packed.
2.5 This Guide may be applied to automated material handling system (AMHS) equipment.
NOTICE: SEMI Standards and Safety Guidelines do not purport to address all safety issues associated with their use. It is the responsibility of the users of the Documents to establish appropriate safety and health practices, and determine the applicability of regulatory or other limitations prior to use.

Referenced SEMI Standards (purchase separately)
SEMI C41 — Specification and Guide for 2-Propanol
SEMI F63 — Guide for Ultrapure Water Used in Semiconductor Processing
NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.

Revision History
SEMI E137-1026 (complete rewrite)
SEMI E137-0705 (Reapproved 0118)E
SEMI E137-0705 (Reapproved 1111)
SEMI E137-0705 (technical revision)
SEMI E137-1104 (first published; replaces SEMI E49.1)

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