SEMI E138 - Specification for XML Semiconductor Common Components

Volume(s): Equipment Automation Software
Language: English
Type: Single Standards Download (.pdf)
Abstract

This Standard was technically approved by the Information & Control Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on August 31, 2016. Available at www.semiviews.org and www.semi.org in February 2017; originally published March 2005; previously published May 2016.

 

This Document is a central location for the definition of common XML elements that are not specific to a single standard, but common across multiple standards.

 

This Document defines the representation of Error, Data Types, Data Value Types, and Unit which are considered common components. The common components are used in association with other XML documents or schemas generated as part of the XML based SEMI Standard Interface Specifications.

 

Referenced SEMI Standards

SEMI E5 — SEMI Equipment Communications Standard 2 Message Content (SECS-II)
SEMI E87 — Specification for Carrier Management (CMS)
SEMI E121 — Guide for Style and Usage of XML for Semiconductor Manufacturing Applications
SEMI E125 — Specification for Equipment Self Description (EqSD)
SEMI E132 — Specification for Equipment Client Authentication and Authorization
SEMI E134 — Specification for Data Collection Management
SEMI E145 — Classification for Measurement Unit Symbols in XML

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