SEMI E139 - Specification for Recipe and Parameter Management (RaP)

Volume(s): Equipment Automation Software
Language: English
Type: Single Standards Download (.pdf)
Abstract

This Standard was technically approved by the global Information & Control Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 16, 2009 Available at www.semiviews.org and www.semi.org in December 2011. Originally published March 2005; previously published March 2010.

 

NOTICE: The designation of SEMI E139 was updated during the 1211 publishing cycle to reflect the changes to SEMI E139.1 and SEMI E139.3.

 

The purpose of this Specification is to specify the cooperative interaction between the factory information and control system (FICS) and the equipment to manage the specifications of equipment processing (for instance, equipment recipes).

 

Subordinate Standards:

SEMI E139.1-0310 — XML Schema for the RaP PDE

SEMI E139.2-1108 — SECS-II Protocol for Recipe and Parameter Management (RaP)

SEMI E139.3-1211 — XML/SOAP Binding for Recipe and Parameter Management

 

Referenced SEMI Standards

SEMI E4 — SEMI Equipment Communications Standard 1 Message Transfer (SECS-I)

SEMI E5 — SEMI Equipment Communication Standard 2 Message Content (SECS-II)

SEMI E30 — Generic Model for Communications and Control of Manufacturing Equipment (GEM)

SEMI E37 — High-Speed SECS Message Services (HSMS) Generic Services

SEMI E40 — Standard for Processing Management

SEMI E120 — Specification for the Common Equipment Module (CEM)

SEMI E121 — Guide for Style & Usage of XML for Semiconductor Manufacturing Applications

SEMI E139 — Recipe and Parameter Management (RaP)

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