E14000 - SEMI E140 - Guide to Calculate Cost of Ownership (COO) Metrics for Gas Delivery Systems

Volume(s): Equipment Automation Hardware
Language: English
Type: Single Standards Download (.pdf)

This Standard was technically approved by the Metrics Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 13, 2017. Available at www.semiviews.org and www.semi.org in June 2018; originally published March 2005; previously published March 2012.


The purpose of this Guide is to provide standard cost of ownership (COO) metrics for evaluating unit production cost effectiveness of gas delivery systems in the semiconductor and related industries.


Gas delivery systems include gases delivered from a solid, liquid, or gaseous source.


This Guide also illustrates how to apply the COO metrics to gas delivery systems. Users should be able to calculate the COO for any gas delivery equipment using this Guide.


The Guide establishes a well-defined procedure to facilitate an understanding of equipment-related costs by providing definitions, classifications, algorithms, methods, and example values necessary to build a full or constrained COO calculator.


This Guide defines a COO metric that can be applied to any gas delivery system. Some terms are specialized to integrated circuit wafer and device production, but may be adapted for other applications in related industries.


Effective use of the metric to build a COO model requires identification of constraints and data values. Where possible, use direct values for inputs rather than deriving them from secondary models or using example values.


Full calculation of COO often requires data held proprietary and is coupled to the overall factory yield and the related cost of yield loss. It is envisioned that this Guide will be used for internal factory and equipment optimization, investment evaluation, and equipment design and process improvements.


Referenced SEMI Standards

SEMI E10 — Specification for Definition and Measurement of Equipment Reliability, Availability, and Maintainability (RAM) and Utilization
SEMI E35 — Guide to Calculate Cost of Ownership (COO) Metrics for Semiconductor Manufacturing Equipment
SEMI E72 — Specification and Guide for Equipment Footprint, Height, and Weight
SEMI E79 — Specification for Definition and Measurement of Equipment Productivity

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