SEMI E142 - 基板マッピングの仕様

Volume(s): Equipment Automation Software
Language: Japanese
Type: Single Standards Download (.pdf)

本スタンダードは,global Information & Control Committeeで技術的に承認されている。現版はglobal Audits and Reviews Subcommittee2006516日に発行が承認された。20066月にwww.semi.orgで,そして20067月にCD-ROMで入手可能となる。初版は20053月発行。前版は20063月発行。

注意:SEMI E142.1, SEMI E142.2, およびSEMI E142.3の改訂を反映して,0211の出版サイクルにて,SEMI E142の出版年月が改訂された。



Subordinate Documents:

SEMI E142.1 -0211 — 基板マッピング用のXMLスキーマ  

SEMI E142.2-0211 — 基板マッピング用SECS IIプロトコル

SEMI E142.3-0211 — 基板マッピング向けWebサービス



Referenced SEMI Standards

SEMI E5 — SEMI Equipment Communications Standard 2 Message Content (SECS-II)
SEMI E30 — Generic Model for Communication and Control of Manufacturing Equipment (GEM) – Event Data Collection and Dynamic Event Report Configuration
SEMI E39 — Object Services Standard; Concept, Behavior and Services
SEMI E39.1 — SECS II Protocol for Object Services Standard (OSS)
SEMI E40 — Standard for Processing Management
SEMI E90 — Specification for Substrate Tracking

SEMI E121 — Guide for Style and Usage of XML for Semiconductor Manufacturing Applications

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