E14200 - SEMI E142 - 基板マッピングの仕様

Volume(s): Equipment Automation Software
Language: Japanese
Type: Single Standards Download (.pdf)
Abstract


注意:SEMI E142.1, SEMI E142.2, およびSEMI E142.3の改訂を反映して,0211の出版サイクルにて,SEMI E142の出版年月が改訂された。

 

ウェーハ,フレーム,ストリップ(短冊状下地),トレーなどの基板のマップデータを報告,保存,伝送する際に必要なデータ項目を本書は定義するものである。

 

Subordinate Standards (included)

SEMI E142.1-0211 — 基板マッピング用のXMLスキーマ

SEMI E142.2-0211 — 基板マッピング用SECS IIプロトコル

SEMI E142.3-0211 — 基板マッピング向けWebサービス 

 

Referenced SEMI Standards (purchase separately)

SEMI E5 — SEMI Equipment Communications Standard 2 Message Content (SECS-II)

SEMI E30 — Generic Model for Communication and Control of Manufacturing Equipment (GEM) – Event Data Collection and Dynamic Event Report Configuration

SEMI E39 — Object Services Standard; Concept, Behavior and Services

SEMI E39.1 — SECS II Protocol for Object Services Standard (OSS)

SEMI E40 — Standard for Processing Management

SEMI E90 — Specification for Substrate Tracking

SEMI E121 — Guide for Style and Usage of XML for Semiconductor Manufacturing Applications

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