SEMI E142 - Specification for Substrate Mapping -

Abstract

^E This Standard was editorially modified in April 2024 to correct an error. Changes were made to Related Information 2.

This Specification defines the data items that are required to report, store, and transmit map data for substrates such as wafers, frames, strips, and trays.

This version of the Specification applies to the substrate types: wafers, frames, strips, and trays.
 

This Specification addresses assembly and packaging including the testing of semiconductor devices.

Subordinate Standards (included)
SEMI E142.1-0224 — Specification for XML Schema for Substrate Mapping
SEMI E142.2-1016 (Reapproved 0224) — Specification for SECS II Protocol for Substrate Mapping
SEMI E142.3-1016 (Reapproved 0224) — Specification for Web Services for Substrate Mapping
SEMI E142.4-1022 (Reapproved 0224) — Specification for SECS II Protocol for Substrate Mapping Using Item Transfer

Referenced SEMI Standards (purchase separately)
SEMI E5 — Specification for SEMI Equipment Communications Standard 2 Message Content (SECS-II)
SEMI E39 — Specification for Object Services: Concept, Behavior, and Services

Revision History

SEMI E142-0224E (editorial revision)

SEMI E142-0224 (technical revision)

SEMI E142-1022 (designation update)

SEMI E142-0921 (technical revision)

SEMI E142-0820 (technical revision)

SEMI E142-0211 (Reapproved 1016)

SEMI E142-0211 (designation update)

SEMI E142-0706 (technical revision)

SEMI E142-0306 (technical revision)

SEMI E142-1105 (technical revision)

SEMI E142-0305 (first published)

SEMI E142.1-0224 (technical revision)
SEMI E142.1-0921E (technical revision)
SEMI E142.1-0921 (technical revision)
SEMI E142.1-1016 (technical revision)
SEMI E142.1-0211 (technical revision)
SEMI E142.1-0706 (technical revision)
SEMI E142.1-0306 (technical revision)
SEMI E142.1-1105 (technical revision)
SEMI E142.1-0705 (technical revision)
SEMI E142.1-0305 (fist published)

SEMI E142.2-1016 (Reapproved 0224)
SEMI E142.2-1016 (technical revision)
SEMI E142.2-1016 (technical revision)
SEMI E142.2-0211 (technical revision)
SEMI E142.2-0306 (first published)

SEMI E142.3-1016 (Reapproved 0224)
SEMI E142.3-1016 (technical revision)
SEMI E142.3-0211 (technical revision)
SEMI E142.3-0706 (first published)

SEMI E142.4-1022 (Reapproved 0224)
SEMI E142.4-1022 (first published)

Interested in purchasing additional SEMI Standards? Consider SEMIViews, an online portal with access to over 1000 Standards.

Refund Policy: Due to the nature of our products, SEMI has a no refund/no exchange policy. Please make sure that you have reviewed your order prior to finalizing your purchase. All sales are final.