SEMI E142 - Specification for Substrate Mapping -

Abstract

1  Purpose
1.1  This Specification defines the data items that are required to report, store, and transmit map data for substrates such as wafers, frames, strips, and trays.
2  Scope
2.1  This version of the Specification applies to the substrate types: wafers, frames, strips, and trays.
2.2  This Specification addresses assembly and packaging including the testing of semiconductor devices.

Subordinate Standards (included)
SEMI E142.1 — Specification for XML Schema for Substrate Mapping
SEMI E142.2 — Specification for SECS II Protocol for Substrate Mapping
SEMI E142.3 — Specification for Web Services for Substrate Mapping
SEMI E142.4 — Specification for SECS II Protocol for Substrate Mapping Using Item Transfer

Referenced SEMI Standards (purchase separately)
SEMI E5 — Specification for SEMI Equipment Communications Standard 2 Message Content (SECS-II)
SEMI E39 — Specification for Object Services: Concept, Behavior, and Services

Revision History
SEMI E142-0225 (technical revision)
SEMI E142-0224E (editorial revision)
SEMI E142-0224 (technical revision)
SEMI E142-1022 (designation update)
SEMI E142-0921 (technical revision)
SEMI E142-0820 (technical revision)
SEMI E142-0211 (Reapproved 1016)
SEMI E142-0211 (designation update)
SEMI E142-0706 (technical revision)
SEMI E142-0306 (technical revision)
SEMI E142-1105 (technical revision)
SEMI E142-0305 (first published)

SEMI E142.1-0225 (technical revision)
SEMI E142.1-0224 (technical revision)
SEMI E142.1-0921E (technical revision)
SEMI E142.1-0921 (technical revision)
SEMI E142.1-1016 (technical revision)
SEMI E142.1-0211 (technical revision)
SEMI E142.1-0706 (technical revision)
SEMI E142.1-0306 (technical revision)
SEMI E142.1-1105 (technical revision)
SEMI E142.1-0705 (technical revision)
SEMI E142.1-0305 (fist published)

SEMI E142.2-0225 (technical revision)
SEMI E142.2-1016 (Reapproved 0224)
SEMI E142.2-1016 (technical revision)
SEMI E142.2-1016 (technical revision)
SEMI E142.2-0211 (technical revision)
SEMI E142.2-0306 (first published)

SEMI E142.3-1016 (Reapproved 0225)
SEMI E142.3-1016 (Reapproved 0224)
SEMI E142.3-1016 (technical revision)
SEMI E142.3-0211 (technical revision)
SEMI E142.3-0706 (first published)

SEMI E142.4-1022 (Reapproved 0225)
SEMI E142.4-1022 (Reapproved 0224)
SEMI E142.4-1022 (first published)

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