E14200 - SEMI E142 - Specification for Substrate Mapping

Volume(s): Equipment Automation Software
Language: English
Type: Single Standards Download (.pdf)

This Specification defines the data items that are required to report, store, and transmit map data for substrates such as wafers, frames, strips, and trays.

This version of the Specification applies to the substrate types: wafers, frames, strips, and trays.


This Specification addresses assembly and packaging including the testing of semiconductor devices.


Subordinate Standards (included)

SEMI E142.1-0921 — Specification for XML Schema for Substrate Mapping

SEMI E142.2-1016 — Specification for SECS II Protocol for Substrate Mapping

SEMI E142.3-1016 — Specification for Web Services for Substrate Mapping


Referenced SEMI Standards (purchase separately)

SEMI E5 — Specification for SEMI Equipment Communications Standard 2 Message Content (SECS-II)

SEMI E39 — Specification for Object Services Standard; Concept, Behavior and Services


Revision History

SEMI E142-0921 (technical revision)

SEMI E142-0820 (technical revision)

SEMI E142-0211 (Reapproved 1016)

SEMI E142-0211 (designation update)

SEMI E142-0706 (technical revision)

SEMI E142-0306 (technical revision)

SEMI E142-1105 (technical revision)

SEMI E142-0305 (first published)


SEMI E142.1-0921 (technical revision)

SEMI E142.1-1016 (technical revision)

SEMI E142.1-0211 (technical revision)

SEMI E142.1-0706 (technical revision)

SEMI E142.1-0306 (technical revision)

SEMI E142.1-1105 (technical revision)

SEMI E142.1-0705 (technical revision)

SEMI E142.1-0305 (fist published)


SEMI E142.2-1016 (technical revision)

SEMI E142.2-0211 (technical revision)

SEMI E142.2-0306 (first published)


SEMI E142.3-1016 (technical revision)

SEMI E142.3-0211 (technical revision)

SEMI E142.3-0706 (first published)

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