SEMI E143 - Test Method for Measuring Power and Variation into a 50-Ω Load and Power Variation and Spectrum into a Load with a VSWR of 2.0 at any phase Angle -

Abstract

The purpose of this Test Method is to provide an accurate method for measuring the output power and spectral content of radio frequency (RF) generators being driven into both matched and mismatched loads to simulate their actual performance in RF power delivery systems for semiconductor processing equipment to support SEMI E113.

This Test Method specifies the testing procedures and test equipment required for precisely determining the output power and spectral variations of RF generators. This Test Method uses a spectrum analyzer, power meter, and signal sampling device, all of which have been previously calibrated by a suitable method recommended by the manufacturer. This Test Method is used to validate three main performance characteristics of RF generators in order to support the following SEMI E113 specifications:

The primary focus for this Test Method is semiconductor processing equipment including, but not limited to, the following equipment types:
• Dry etch equipment
• Film deposition equipment (chemical vapor deposition [CVD] and physical vapor deposition [PVD])

Referenced SEMI Standards (purchase separately)
SEMI E113 — Specification for Semiconductor Processing Equipment RF Power Delivery Systems
SEMI E114 — Test Method for RF Cable Assemblies Used in Semiconductor Processing Equipment RF Power Delivery Systems

Revision History
SEMI E143-0306 (Reapproved 0324)
SEMI E143-0306 (Reapproved 0518)
SEMI E143-0306 (Reapproved 0512)
SEMI E143-0306 (first published)

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