SEMI E144 - Specification for RF Air Interface Between RFID Tags in Carriers and RFID Readers in Semiconductor Production and Material Handling Equipment

Volume(s): Equipment Automation Hardware
Language: English
Type: Single Standards Download (.pdf)

This Standard was technically approved by the global Physical Interfaces & Carriers Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 24, 2011. Available at and in March 2012; originally published March 2005; previously published March 2006.


This Specification provides public specifications for the required elements of new carrier radio frequency (RF) identification tags to make them 100% backward-compatible with existing (pre-2006) equipment installations.


This Specification addresses the RF air interface associated with such tags.


This Specification describes common communication protocols for the purposes of radio frequency identification for semiconductor production and material handling.


Referenced SEMI Standards


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