SEMI E144 - Specification for RF Air Interface Between RFID Tags in Carriers and RFID Readers in Semiconductor Production and Material Handling Equipment -

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Volume(s): Equipment Automation Hardware
Language: English
Type: Single Standards Download (.pdf)
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Revision: SEMI E144-0312 - Inactive



NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.


This Specification provides public specifications for the required elements of new carrier radio frequency (RF) identification tags to make them 100% backward-compatible with existing (pre-2006) equipment installations.


This Specification addresses the RF air interface associated with such tags.


This Specification describes common communication protocols for the purposes of radio frequency identification for semiconductor production and material handling.

This Specification defines HDX RFID systems operating at a frequency of 134.2 kHz.


This Specification provides the requirements for such parameters as frequency, modulation, data rate, data format, read/write capabilities, memory capability, etc.


This Specification is based on the RFID parameters currently being used in the majority of semiconductor equipment production use applications.


This Specification is compatible with ISO/IEC 18000-2 except where noted. It extends and specializes this Standard for application in semiconductor device and integrated circuit manufacturing.


Other RFID-related physical parameters are beyond the scope of this Specification, and are to be addressed in standards yet to be developed.


This Specification describes common communications protocols for the purposes of radio frequency identification for semiconductor production and material handling.


This Document defines two types of interfaces: Type 1) RI-TRP-DR2B HDX MPT and Type 2) ISO/IEC 18000-2 Type B (HDX).


Referenced SEMI Standards


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