SEMI E145 - Classification for Measurement Unit Symbols in XML

Volume(s): Equipment Automation Software
Language: English
Type: Single Standards Download (.pdf)

The inclusion of eXtensible markup language (XML) notation within current SEMI Standards reflects the industry’s growing interest in XML technology. This Standard defines the measurement units’ symbol representations in XML for the semiconductor industry based on units defined in SEMI E5, SEMI E6, and the International System of Units (SI). Its purpose is to provide a standardized set of symbols that represent common units for the semiconductor industry and to describe a method to add other symbols based on a standard approach using a common set of rules.

This Standard defines measurement unit symbols and describes a common method to add more symbols for those units not included in this Classification. It defines the unit object representation to be used in conjunction with other objects and provides its schema for representation in XML. A partial number of commonly used units and their symbols are also provided. This Classification includes the following:

·    Unit Object Definition

·    Unit Classification Table Definitions

·    Definition of Standardized Symbols

·    Rules for Adding Other Unit Symbols


Referenced SEMI Standards

SEMI E5 — Specification for SEMI Equipment Communications Standard 2 Message Content (SECS-II)

SEMI E6 — Guide for Equipment Semiconductor Installation Documentation

SEMI E30 — Specification for the Generic Model for Communications and Control of Manufacturing Equipment (GEM)

SEMI E121 — Guide for Style and Usage of XML for Semiconductor Manufacturing Applications

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