SEMI E147 - Guide for Equipment Data Acquisition (EDA) -

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Non-Member Price: $170.00

Volume(s): Equipment Automation Software
Language: English
Type: Single Standards Download (.pdf)
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Revision: SEMI E147-0307E - Inactive



This standard was technically approved by the global Information & Control Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on November 21, 2006. It was available at in February 2007.


E This standard was editorially modified in September 2007 to remove duplicate sections. Changes were made to § 6.


This guide document provides additional information about the Equipment Data Acquisition (EDA) SEMI Standards suite, explains the relationship among those standards, and presents basic concepts for implementation to ensure the EDA specifications are properly applied.


Referenced SEMI Standards

SEMI E5 — SEMI Equipment Communications Standard 2 Message Content (SECS-II)

SEMI E30 — Generic Model for Communications and Control of Manufacturing Equipment (GEM)

SEMI E39 — Object Services Standard: Concepts, Behavior, and Services

SEMI E40 — Standard for Processing Management

SEMI E87 — Specification for Carrier Management (CMS)

SEMI E90 — Specification for Substrate Tracking

SEMI E94 — Specification for Control Job Management

SEMI E116 — Specification for Equipment Performance Tracking (EPT)

SEMI E120 — Specification for the Common Equipment Model (CEM)

SEMI E125 — Specification for Equipment Self Description (EqSD)

SEMI E132 — Specification for Equipment Client Authentication and Authorization

SEMI E134 — Specification for Data Collection Management (DCM)

SEMI E138 — XML Semiconductor Common Components

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