SEMI E149 - Guide for Equipment Supplier-Provided Documentation for the Acquisition and Use of Manufacturing Equipment
This Standard was technically approved by the Metrics Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 23, 2013. Available at www.semiviews.org and www.semi.org in March 2014; originally published July 2007; previously published July 2008.
NOTICE: Paragraphs titled NOTE and sections titled RELATED INFORMATION are not official parts of this Document and are not intended to modify or supersede it.
This Standard presents recommendations for content and usability of documentation provided by the equipment supplier to the equipment purchaser for acquisition and use of semiconductor, flat panel display (FPD), or other related manufacturing equipment. This Standard will support more effective equipment acquisition (e.g., purchase, lease) agreements between the equipment supplier and purchaser. Complete documentation can improve the purchaser’s ability to acquire, install, use, maintain, and repair the equipment, which increases productivity and reduces costs.
This Standard applies to all documentation provided by the equipment supplier to the equipment purchaser for new semiconductor, FPD, or other related manufacturing equipment and supplier-provided support equipment to cover aspects of equipment acquisition, installation, operation, maintenance, repair, and disposal.
Referenced SEMI Standards
SEMI E5 — SEMI Equipment Communications Standard 2 Message Content (SECS-II)
SEMI E6 — Guide for Semiconductor Equipment Installation Documentation
SEMI E10 — Specification for Definition and Measurement of Equipment Reliability, Availability, and Maintainability (RAM) and Utilization
SEMI E30 — Generic Model for Communications and Control of Manufacturing Equipment (GEM)
SEMI E33 — Guide for Semiconductor Manufacturing Electromagnetic Compatibility (EMC)
SEMI E36 — Semiconductor Equipment Manufacturing Information Tagging Specification
SEMI E70 — Guide for Tool Accommodation Process
SEMI E72 — Specification and Guide for 300 mm Equipment Footprint, Height, and Weight
SEMI E76 — Guide for 300 mm Process Equipment Points of Connection to Facility Services
SEMI E137 — Guide for Final Assembly, Packaging, Transportation, Unpacking, and Relocation of Semiconductor Manufacturing Equipment
SEMI E139 — Specification for Recipe and Parameter Management (RaP)
SEMI E150 — Guide for Equipment Training Best Practices
SEMI S2 — Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment
SEMI S8 — Safety Guideline for Ergonomics Engineering for Semiconductor Manufacturing Equipment
SEMI S13 — Environmental, Health and Safety Guideline for Documents Provided to the Equipment User for Use with Semiconductor Manufacturing Equipment
SEMI S16 — Guide for Semiconductor Manufacturing Equipment Design for Reduction of Environmental Impact at End of Life
SEMI S23 — Guide for Conservation of Energy, Utilities and Materials Used by Semiconductor Manufacturing Equipment