SEMI E150 - Guide for Equipment Training Best Practices

Volume(s): Equipment Automation Hardware
Language: English
Type: Single Standards Download (.pdf)

This Standard was technically approved by the Metrics Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 23, 2013. Available at and in March 2014; originally published November 2007.


NOTICE: Paragraphs titled NOTE and sections titled RELATED INFORMATION are not official parts of this Document and are not intended to modify or supersede it.


The purpose of this Standard is to provide recommendations for developing and delivering equipment training so that it is performance-based. Performance-Based Equipment Training (PBET) improves the likelihood that the workforce of semiconductor equipment owners can successfully install, use, maintain, and repair their equipment. In so doing, PBET improves the equipment owner’s ability to attain reliability, availability, and maintainability (RAM) goals based on the metrics defined in SEMI E10. As such, PBET helps to increase productivity and reduce costs based on the metrics defined in SEMI E79 and SEMI E35, respectively.


This Standard applies to any company that must develop equipment training.


The Standard is applicable to training for anyone that works with equipment, including operators, maintenance technicians and engineers, service personnel, and applications/process technicians and engineers.


This Standard provides guidelines for both the process of developing and delivering equipment training that is performance-based, as well as the essential characteristics of the resulting PBET product.


This Standard does not preclude the use of Criterion-Referenced Instruction (CRI).


Referenced SEMI Standards

SEMI E10 — Specification for Definition and Measurement of Equipment Reliability, Availability, and Maintainability (RAM) and Utilization
SEMI E35 — Guide to Calculate Cost of Ownership (COO) Metrics for Semiconductor Manufacturing Equipment
SEMI E79 — Specification for Definition and Measurement of Equipment Productivity
SEMI E149 — Guide for Equipment Supplier-Provided Documentation for the Acquisition and Use of Manufacturing Equipment

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