SEMI E151 - データ品質を理解するためのガイド -

Member Price: $155.00
Non-Member Price: $203.00

Volume(s): Equipment Automation Software
Language: Japanese
Type: Single Standards Download (.pdf)
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Revision: SEMI E151-0309 - Superseded



本スタンダードは,global Information & Control Committeeで技術的に承認されている。現版は2009年1月2日,global Audits and Reviews Subcommitteeにて発行が承認された。2009年2月にwww.semi.orgで,そして2009年3月にCD-ROMで入手可能となる。








Referenced SEMI Standards

SEMI E5 — SEMI Equipment Communications Standard 2 Message Content (SECS-II)
SEMI E54 — Sensor/Actuator Network Standard
SEMI E120 — Specification for the Common Equipment Model (CEM)
SEMI E125 — Specification for Equipment Self Description (EqSD)
SEMI E132 — Specification for Equipment Client Authentication and Authorization
SEMI E134 — Specification for Data Collection Management (DCM)

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