SEMI E151 - Guide for Understanding Data Quality
This Standard was technically approved by the Information & Control Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 8, 2016. Available at www.semiviews.org and www.semi.org in May 2017; originally published March 2009; previously published December 2011.
The purpose of this Guide is to provide common terminology and definitions that can be used when addressing the quality of semiconductor equipment generated data. It establishes a set of common definitions that help specify, communicate, address, and discuss the quality of data produced by the production equipment.
This Guide contains the following component:
Background and description of an approach to understanding data quality and associated terminology.
Referenced SEMI Standards
SEMI E5 — SEMI Equipment Communications Standard 2 Message Content (SECS-II)
SEMI E54 — Specification for Sensor/Actuator Network
SEMI E120 — Specification for the Common Equipment Model (CEM)
SEMI E125 — Specification for Equipment Self Description (EqSD)
SEMI E132 — Specification for Equipment Client Authentication and Authorization
SEMI E134 — Specification for Data Collection Management (DCM)
SEMI E145 — Classification for Measurement Unit Symbols in XML