SEMI E1.9 — Mechanical Specification for Cassette Used to Transport and Store 300mm Wafers
SEMI E19.4 — 200 mm Standard Mechanical Interface (SMIF)
SEMI E57 — Mechanical Specification for Kinematic Couplings Used to Align and Support 300 mm Wafer Carriers
SEMI E100 — Specification for a Reticle SMIF pod (RSP) to Transport and Store 6 Inch or 230mm Reticles
SEMI P37 — Specification for Extreme Ultraviolet Lithography Mask Substrates
SEMI P38 — Specification for Absorbing Film Stacks and Multilayers on Extreme Ultraviolet Mask Blanks
SEMI P40 — Specification for Mounting Requirements and Alignment Reference Locations for Extreme Ultraviolet Mask
SEMI T16 — Specification for the use of Data Matrix Symbology for Automated Identification of Extreme Ultraviolet Masks
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