SEMI E153 - Specification for AMHS SEM (AMHS SEM)
This Standard was technically approved by the Information & Control Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 8, 2016. Available at www.semiviews.org and www.semi.org in May 2017; originally published November 2009; previously published March 2010.
This Standard establishes a Specific Equipment Model (SEM) for automated material handling system (AMHS) (AMHS SEM). The model consists of equipment characteristics and behaviors that are to be implemented in addition to the SEMI E30 fundamental requirements and selected additional capabilities. The intent of this Standard is to facilitate the integration of AMHS SEM equipment into an automated (e.g., semiconductor fabrication) factory. This Document accomplishes this by defining an operational model for AMHS SEM equipment as viewed by a factory automation controller (Host). This definition provides a standard host interface and equipment operational behavior (e.g., control, state models, data reports, and reporting levels). Several topics require additional activity that are within the scope of this Standard: traffic management characteristics (queuing), parallel interface for carrier transfer (SEMI E84), transport and storage system controller architecture, and delivery of the transfer unit.
The scope of this Standard is limited to the usage and description of material handling devices that support transport, storage or a combination of both transport and storage as perceived by a SEMI Equipment Communications Standard 2 (SECS-II) host that complies with the GEM model (as specified in § 11). It defines the view of the equipment through the SECS communication link. It does not define the internal operation of the equipment. It includes a specific transfer command state model and transport and storage system controller (TSSC) state model as the basis for all equipment of this class.
This Document assumes that the GEM fundamental requirements and selected additional capabilities (as specified in § 11) have been implemented on the AMHS SEM equipment. It expands the GEM standard requirements and capabilities in the areas of state models (TSSC, transfer command, vehicle and carrier state models), collection events, alarm documentation, remote commands, data item variables, and material movement.
Referenced SEMI Standards
SEMI E30 — Generic Model for Communications and Control of Manufacturing Equipment (GEM)
SEMI E37 — High-Speed SECS Message Services (HSMS) Generic Services
SEMI E84 — Specification for Enhanced Carrier Handoff Parallel I/O Interface