SEMI E154 - Specification for Mechanical Features of 450 mm Load Port

Volume(s): Equipment Automation Hardware
Language: English
Type: Single Standards Download (.pdf)
Abstract

The purpose of this Document is to define the basic interface dimensions of a load port on the semiconductor manufacturing equipment (SME), where a 450 FOUP and 450 MAC can be loaded and unloaded. The intention of this Document is to define a set of requirements and features to enable interoperability of load ports and carriers without limiting innovative solutions.

 

The interface specification in this Document is driven by and intended to mate with a carrier compliant to the relevant SEMI 450 mm FOUP and 450 mm MAC Standards.

 

Loading and unloading is assumed to take place in semi-automated and automated mode by using any kind of system or device (i.e., person guided vehicle or overhead hoist vehicle).

 

Referenced SEMI Standards

SEMI E63 — Specification for 300 mm Box Opener/Loader to Tool Standard (BOLTS-M) Interface
SEMI E110 — Guideline for Indicator Placement Zone and Switch Placement Volume of Load Port Operation Interface for 300 mm Load Ports
SEMI E158 — Specification For Mechanical Features of Fab Wafer Carrier Used To Transport and Store 450 mm Wafers (450 FOUP) and Kinematic Coupling

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