SEMI E156 - Specification for Mechanical Interfaces Between 450 mm Automated Material Handling Systems (AMHS) Stocker to Transport Equipment
NOTICE: This Document was completely rewritten in 2015.
The purpose of this Document is to define interfaces between automated material handling systems (AMHS) stocker and different types of transport equipment and to clarify dimensions required for 450 Wafer Carrier transfer.
The specification in this Document covers representative handoff interfaces between 450 mm AMHS stocker and transport equipment for 450 Wafer Carrier.
Referenced SEMI Standards (purchase separately)
SEMI E154 — Mechanical Interface Specification for 450 mm Load Port
SEMI E158 — Mechanical Specification for Fab Wafer Carrier Used to Transport and Store 450 mm Wafers (450 FOUP) and Kinematic Coupling
SEMI E159 — Mechanical Specification for Multi Application Carrier (MAC) Used to Transport and Ship 450 mm Wafers
SEMI G92 — Specification for Tape Frame Cassette for 450 mm Wafer
SEMI M80 — Mechanical Specification for Front-Opening Shipping Box Used to Transport and Ship 450 mm Wafers
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