SEMI E156 - Specification for Mechanical Interfaces Between 450 mm Automated Material Handling Systems (AMHS) Stocker to Transport Equipment -

Abstract

NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.

 

The purpose of this Specification is to define interfaces between automated material handling systems (AMHS) stocker and different types of transport equipment and to clarify dimensions required for 450 Wafer Carrier transfer.

The specification in this Standard covers representative handoff interfaces between 450 mm AMHS stocker and transport equipment for 450 Wafer Carrier.

 

Referenced SEMI Standards (purchase separately)

SEMI E154 — Specification for Mechanical Features of 450 mm Load Port

SEMI E158 — Specification for Mechanical Features of Fab Wafer Carrier Used to Transport and Store 450 mm Wafers (450 FOUP) and Kinematic Coupling

SEMI E159 — Specification for Mechanical Features of Multi Application Carrier (MAC) Used to Transport and Ship 450 mm Wafers

SEMI G92 — Specification for Tape Frame Cassette for 450 mm Wafer

SEMI M80 — Specification for Front-Opening Shipping Box Used to Transport and Ship 450 mm Wafers

 

Revision History

SEMI E156-1115 (complete rewrite)

SEMI E156-0710 (first published)

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