SEMI E156 - Specification for Mechanical Interfaces Between 450 mm Automated Material Handling Systems (AMHS) Stocker to Transport Equipment

Volume(s): Equipment Automation Hardware
Language: English
Type: Single Standards Download (.pdf)
Abstract

This Standard was technically approved by the Physical Interfaces & Carriers Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on August 31, 2015. Available at www.semiviews.org and www.semi.org in November 2015; originally published July 2010.

 

NOTICE: This Document was completely rewritten in 2015.

 

The purpose of this Document is to define interfaces between automated material handling systems (AMHS) stocker and different types of transport equipment and to clarify dimensions required for 450 Wafer Carrier transfer.

 

The specification in this Document covers representative handoff interfaces between 450 mm AMHS stocker and transport equipment for 450 Wafer Carrier.

 

Referenced SEMI Standards

SEMI E154 — Mechanical Interface Specification for 450 mm Load Port
SEMI E158 — Mechanical Specification for Fab Wafer Carrier Used to Transport and Store 450 mm Wafers (450 FOUP) and Kinematic Coupling
SEMI E159 — Mechanical Specification for Multi Application Carrier (MAC) Used to Transport and Ship 450 mm Wafers
SEMI G92 — Specification for Tape Frame Cassette for 450 mm Wafer
SEMI M80 — Mechanical Specification for Front-Opening Shipping Box Used to Transport and Ship 450 mm Wafers

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