SEMI E157 - Specification for Module and Substrate Process Tracking -

Abstract

* This Standard has the option to purchase the Current document with a redline document (Current + Redline). The redline document is included with the Current document as a comparison tool to help identify changes that have been made between the Current version and the previous version (Superseded). If differences should exist between the redline document and the Current document, the Current version is the official and authoritative version.

1  Purpose
1.1  The purpose of this Specification is to define a standard equipment capability to report recipe step and process-related data to the factory system. The subject of this Specification is the activities of a processing location (i.e., process module or process area) that are related to the execution of a recipe.
1.2  The collection of process data during recipe execution is important to today’s factories to support various applications that help optimize equipment processes, finished product quality, yield, and overall factory performance.
1.3  This process data reporting capability provides a factory’s applications the means of linking sampled time series data (Traces) and summary process data to related context data. Standard events that document recipe execution in the process module or process area guarantee the availability of such context information. The context data may include such items as identification of process job, equipment recipe, and affected substrates. The reporting capability provides a record of start and/or end of processing, with granularity to the recipe step level.
1.4  This Specification defines two ways to report recipe execution. An equipment may implement both techniques.
1.4.1  For equipment with process modules, reporting of the collection events are process module-specific to support the reporting of process module-specific data parameters. Each process module will typically have a different set of context and process data parameter values. A general event, one that applies to all process chambers, would report the same data, independent of which process module the current event report represents. Such general events do not support reporting of different data sets for each process module, as needed to capture the unique data parameters available from each.
1.4.2  For equipment with continuous flow operation, the equipment reports recipe step activities. This can be for individual substrates or a batch of substrates. The same collection events and data parameters are available to identify all substrate(s) and recipe activity information. This reporting can also be applied to equipment with process modules.
2  Scope
2.1  This Standard applies to data collection related to the portion of equipment recipe execution that directly affects the processing locations (process modules and process areas) within production equipment.
2.2  This Standard addresses:
• Equipment recipe execution as it directly affects process modules
• Process module and substrate process tracking state models for recipe execution
• Event reporting for process data collection
• Process context data parameters
• Equipment recipe components and recipe steps contained in the recipe components as they apply to process modules
• Reporting recipe execution and recipe step execution
 o substrates in one or more process modules where the recipe execution begins and ends simultaneously for all substrates in the process module
 o multiple substrates where the substrates enter and exit the process module in a continuous flow where recipe execution for each substrate can be staggered
• Objects for reporting process module and substrate process activity when SEMI E39 objects are supported
NOTICE: SEMI Standards and Safety Guidelines do not purport to address all safety issues associated with their use. It is the responsibility of the users of the Documents to establish appropriate safety and health practices, and determine the applicability of regulatory or other limitations prior to use.

Referenced SEMI Standards (purchase separately)
SEMI E5 — Specification for SEMI Equipment Communications Standard 2 Message Content (SECS-II)
SEMI E30 — Specification for the Generic Model for Communications and Control of Manufacturing Equipment (GEM)
SEMI E40 — Specification for Processing Management
SEMI E87 — Specification for Carrier Management (CMS)
SEMI E90 — Specification for Substrate Tracking
SEMI E172 — Specification for SECS Equipment Data Dictionary (SEDD)
NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.

Revision History
SEMI E157-1125 (technical revision)
SEMI E157-0611 (Reapproved 0616)
SEMI E157-0611 (technical revision)
SEMI E157-0211 (technical revision)
SEMI E157-0710 (first published)
 

Interested in purchasing additional SEMI Standards? Consider SEMIViews, an online portal with access to over 1000 Standards.

Refund Policy: Due to the nature of our products, SEMI has a no refund/no exchange policy. Please make sure that you have reviewed your order prior to finalizing your purchase. All sales are final.