SEMI E158 - Specification for Mechanical Features of Fab Wafer Carrier Used to Transport and Store 450 mm Wafers (450 FOUP) and Kinematic Coupling -

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Volume(s): Equipment Automation Hardware
Language: English
Type: Single Standards Download (.pdf)
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Revision: SEMI E158-0819 - Current



The purpose of this Document is to establish basic physical dimensions for the carriers intended to be used to transport and store 450 mm wafers, as specified by SEMI M74, within semiconductor device manufacturing facilities.

This Document is intended to define the reference planes for the dimensions of the carriers and the load port features that will interact with the carriers.

This Document is intended to define a set of requirements to ensure interoperability of load ports and carriers without limiting innovative solutions.

This Document specifies the external features and dimensions of the 450 mm carrier.

This Document specifies the interior exclusion volumes for supporting and restraining wafers in the 450 mm carrier.

This Document specifies the critical dimensions and locations of the kinematic coupling pins (KCPs) that will support and position the 450 mm carriers.

This Document defines three orthogonal reference planes as references for carrier dimensions.

Referenced SEMI Standards (purchase separately)

SEMI E144 — Specification for RF Air Interface Between RFID Tags in Carriers and RFID Reader in Semiconductor Production and Material Handling Equipment
SEMI M74 — Specification for 450 mm Diameter Mechanical Handling Polished Wafers

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