SEMI E159 - Specification for Mechanical Features of Multi Application Carrier (MAC) Used to Transport and Ship 450 mm Wafers

Volume(s): Equipment Automation Hardware
Language: English
Type: Single Standards Download (.pdf)
Abstract

The purpose of this Document is to establish basic physical dimensions for the carriers intended to be used to transport and ship 450 mm wafers, as specified by SEMI M74.

 

This Document is intended to define the reference planes for the dimensions of the carriers and the load port features that will interact with the carriers.

 

This Document is intended to define a set of requirements to ensure interoperability of load ports and carriers without limiting innovative solutions.

 

This Standard assumes that the 450 MAC is primarily used during silicon wafer manufacturing and for storage and shipping of processed device wafers, while maintaining wafer quality and allowing automated use of the carrier. It is recommended that wafers be transferred from the MAC to a 450 FOUP and 450 FOUP to MAC, using automated methods.

 

This Document specifies the external features and dimensions of the 450 mm carrier.

 

This Document specifies the interior exclusion volumes for supporting and restraining wafers in the 450 mm carrier.

 

This Document specifies the critical dimensions and locations of the kinematic pins that will support and position the 450 mm carriers.

 

This Document defines three orthogonal reference planes as references for carrier dimensions.

 

Referenced SEMI Standards

SEMI E1.9 — Mechanical Specification for Cassettes Used to Transport and Store 300 mm Wafers

SEMI E30.1 — Specification for Inspection and Review Specific Equipment Model (ISEM)

SEMI E144 — Specification for RF Air Interface Between RFID Tags in Carriers and RFID Readers in Semiconductor Production and Material Handling Equipment

SEMI E154 — Specification for Mechanical Features of 450 mm Load Port

SEMI M74 — Specification for 450 mm Diameter Mechanical Handling Polished Wafers


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