E16000 - SEMI E160 - Specification for Communication of Data Quality

Volume(s): Equipment Automation Software
Language: English
Type: Single Standards Download (.pdf)

This Standard was technically approved by the Information & Control Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 8, 2016. Available at www.semiviews.org and www.semi.org in March 2017; originally published February 2011.


NOTICE: This Document was reapproved with minor editorial changes.


With the semiconductor industry deploying e-Manufacturing, the data equipment generates is critical to improving equipment productivity. The quality of that reported data is of paramount importance to ensure successful use of software applications that use and/or analyze the data. It impacts communications including SECS (SEMI Equipment Communications Standard) and Equipment Data Acquisition (EDA) interfaced systems. The purpose of this Standard is to provide a generally acceptable specification for communicating the quality of semiconductor equipment data. This Standard is intended to be used in the following ways:

  • To establish a set of metrics for communication of quality of data produced by semiconductor equipment.
  • To communicate the quality of selected data parameters produced by semiconductor equipment.
  • To provide a measurable level of data quality to ensure quality of service and/or quality of performance of applications used by equipment suppliers, semiconductor manufacturers, equipment subsystem suppliers, and control system suppliers.

To provide data quality reporting compliance methods.


This Specification defines metrics and calculations for reporting equipment data quality. The data within scope of this Standard is any data that is retrievable from semiconductor equipment via electronic interfaces. Data quality metrics allow for the quantification of a data quality attribute or element so that this attribute or element can be communicated and verified. This Document defines data quality metrics corresponding to the Aspects, Attributes, and Elements of data quality as defined in SEMI E151, Guide for Understanding Data Quality.


Referenced SEMI Standards

SEMI E5 — SEMI Equipment Communications Standard (SECS-II)
SEMI E30 — Generic Model for Communications and Control of SEMI Equipment (GEM)
SEMI E37 — High-Speed SECS Message Services (HSMS) Generic Services
SEMI E54 — Specification for Sensor/Actuator Network
SEMI E120 — Specification for the Common equipment Model (CEM)
SEMI E125 — Specification for Equipment Self Description (EqSD)
SEMI E128 — Specification for XML Message Structures
SEMI E132 — Specification for Equipment Client Authentication and Authorization
SEMI E134 — Specification for Data Collection Management (DCM)
SEMI E138 — Specification for XML Semiconductor Common Components
SEMI E145 — Classification for Measurement Unit Symbols in XML
SEMI E151 — Guide for Understanding Data Quality

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