E16200 - SEMI E162 - Mechanical Interface Specification for 450 mm Front-Opening Shipping Box Load Port

Volume(s): Equipment Automation Hardware
Language: English
Type: Single Standards Download (.pdf)

NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.


The purpose of this Document is to define the basic interface dimensions of a load port on the semiconductor manufacturing equipment, where a 450 front-opening shipping box (FOSB) can be loaded and unloaded. The intention of this Document is to define a set of requirement and features to enable interoperability of load ports and carriers without limiting innovative solutions.

The interface specification in this Document is driven by and intended to mate with a carrier compliant to the relevant SEMI 450 mm FOSB Standard.


Loading and unloading is assumed to take place in semi-automated and automated mode by using any kind of system or device (e.g., Person guided vehicle or overhead hoist vehicle).


Referenced SEMI Standards

SEMI E154 — Mechanical Interface Specification for 450 mm Load Port

SEMI M80 — Mechanical Specification for Front-Opening Shipping Box Used to Transport and Ship 450 mm Wafers


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