SEMI E162 - Mechanical Interface Specification for 450 mm Front-Opening Shipping Box Load Port

Volume(s): Equipment Automation Hardware
Language: English
Type: Single Standards Download (.pdf)
Abstract

This Standard was technically approved by the global Physical Interfaces & Carriers Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on June 18, 2012. Available at www.semiviews.org and www.semi.org in September 2012; originally published November 2011.

 

The purpose of this Document is to define the basic interface dimensions of a load port on the semiconductor manufacturing equipment, where a 450 front-opening shipping box (FOSB) can be loaded and unloaded. The intention of this Document is to define a set of requirement and features to enable interoperability of load ports and carriers without limiting innovative solutions.

 

Referenced SEMI Standards

SEMI E154 Mechanical Interface Specification for 450 mm Load Port
SEMI M80 — Mechanical Specification for Front-Opening Shipping Box Used to Transport and Ship 450 mm Wafers

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