SEMI E162 - Mechanical Interface Specification for 450 mm Front-Opening Shipping Box Load Port
This Standard was technically approved by the global Physical Interfaces & Carriers Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on June 18, 2012. Available at www.semiviews.org and www.semi.org in September 2012; originally published November 2011.
The purpose of this Document is to define the basic interface dimensions of a load port on the semiconductor manufacturing equipment, where a 450 front-opening shipping box (FOSB) can be loaded and unloaded. The intention of this Document is to define a set of requirement and features to enable interoperability of load ports and carriers without limiting innovative solutions.
Referenced SEMI Standards
SEMI E154 ― Mechanical Interface Specification for 450 mm Load Port
SEMI M80 — Mechanical Specification for Front-Opening Shipping Box Used to Transport and Ship 450 mm Wafers