SEMI E164 - Specification for EDA Common Metadata -
The purpose of this Specification is to promote commonality among implementations by defining common representations and conventions of equipment metadata based on SEMI E125 Specification for Equipment Self-Description.
The scope of this Specification includes:
- Common approaches for defining specific elements of equipment metadata
- The metadata representation of selected SEMI Communication Standards, including those widely used in 300 mm semiconductor factories
This Specification defines equipment metadata based on SEMI E125-0710 and SEMI E120-0310.
This Specification applies only to production equipment that act on substrates.
Referenced SEMI Standards (purchase separately)
SEMI E30 — Specification for the Generic Model for Communications and Control of Manufacturing Equipment (GEM)
SEMI E39 — Specification for Object Services Standard: Concepts, Behavior, and Services
SEMI E40 — Specification for Processing Management
SEMI E87 — Specification for Carrier Management (CMS)
SEMI E90 — Specification for Substrate Tracking
SEMI E94 — Specification for Control Job Management
SEMI E116 — Specification for Equipment Performance Tracking (EPT)
SEMI E120 — Specification for the Common Equipment Model (CEM)
SEMI E125 — Specification for Equipment Self-Description (EqSD)
SEMI E132 — Specification for Equipment Client Authentication and Authorization
SEMI E134 — Specification for Data Collection Management (DCM)
SEMI E145 — Classification for Measurement Unit Symbols in XML
SEMI E148 — Specification for Time Synchronization and Definition of the TS-Clock Object
SEMI E157 — Specification for Module Process Tracking
SEMI E164-0414 (Reapproved 0721)
SEMI E164-0414 (technical revision)
SEMI E164-0313E (editorial revision)
SEMI E164-0313 (technical revision)
SEMI E164-0712 (first published)
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