E16400 - SEMI E164 - Specification for EDA Common Metadata

Volume(s): Equipment Automation Software
Language: English
Type: Single Standards Download (.pdf)

The purpose of this Specification is to promote commonality among implementations by defining common representations and conventions of equipment metadata based on SEMI E125 Specification for Equipment Self-Description.


The scope of this Specification includes:

- Common approaches for defining specific elements of equipment metadata

- The metadata representation of selected SEMI Communication Standards, including those widely used in 300 mm semiconductor factories


This Specification defines equipment metadata based on SEMI E125-0710 and SEMI E120-0310.


This Specification applies only to production equipment that act on substrates.


Referenced SEMI Standards (purchase separately)

SEMI E30 — Specification for the Generic Model for Communications and Control of Manufacturing Equipment (GEM)

SEMI E39 — Specification for Object Services Standard: Concepts, Behavior, and Services

SEMI E40 — Specification for Processing Management

SEMI E87 — Specification for Carrier Management (CMS)

SEMI E90 — Specification for Substrate Tracking

SEMI E94 — Specification for Control Job Management

SEMI E116 — Specification for Equipment Performance Tracking (EPT)

SEMI E120 — Specification for the Common Equipment Model (CEM)

SEMI E125 — Specification for Equipment Self-Description (EqSD)

SEMI E132 — Specification for Equipment Client Authentication and Authorization

SEMI E134 — Specification for Data Collection Management (DCM)

SEMI E145 — Classification for Measurement Unit Symbols in XML

SEMI E148 — Specification for Time Synchronization and Definition of the TS-Clock Object

SEMI E157 — Specification for Module Process Tracking


Revision History

SEMI E164-0414 (Reapproved 0721)

SEMI E164-0414 (technical revision)

SEMI E164-0313E (editorial revision)

SEMI E164-0313 (technical revision)

SEMI E164-0712 (first published)

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