SEMI E164 - Specification for EDA Common Metadata -

Member Price: $130.00
Non-Member Price: $170.00

Volume(s): Equipment Automation Software
Language: English
Type: Single Standards Download (.pdf)
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Revision: SEMI E164-0414 (Reapproved 0721) - Current



The purpose of this Specification is to promote commonality among implementations by defining common representations and conventions of equipment metadata based on SEMI E125 Specification for Equipment Self-Description.


The scope of this Specification includes:

- Common approaches for defining specific elements of equipment metadata

- The metadata representation of selected SEMI Communication Standards, including those widely used in 300 mm semiconductor factories


This Specification defines equipment metadata based on SEMI E125-0710 and SEMI E120-0310.


This Specification applies only to production equipment that act on substrates.


Referenced SEMI Standards (purchase separately)

SEMI E30 — Specification for the Generic Model for Communications and Control of Manufacturing Equipment (GEM)

SEMI E39 — Specification for Object Services Standard: Concepts, Behavior, and Services

SEMI E40 — Specification for Processing Management

SEMI E87 — Specification for Carrier Management (CMS)

SEMI E90 — Specification for Substrate Tracking

SEMI E94 — Specification for Control Job Management

SEMI E116 — Specification for Equipment Performance Tracking (EPT)

SEMI E120 — Specification for the Common Equipment Model (CEM)

SEMI E125 — Specification for Equipment Self-Description (EqSD)

SEMI E132 — Specification for Equipment Client Authentication and Authorization

SEMI E134 — Specification for Data Collection Management (DCM)

SEMI E145 — Classification for Measurement Unit Symbols in XML

SEMI E148 — Specification for Time Synchronization and Definition of the TS-Clock Object

SEMI E157 — Specification for Module Process Tracking


Revision History

SEMI E164-0414 (Reapproved 0721)

SEMI E164-0414 (technical revision)

SEMI E164-0313E (editorial revision)

SEMI E164-0313 (technical revision)

SEMI E164-0712 (first published)

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