SEMI E164 - Specification for EDA Common Metadata

Volume(s): Equipment Automation Software
Language: English
Type: Single Standards Download (.pdf)

This Standard was technically approved by the Information & Control Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 23, 2013. Available at and in April 2014; originally published July 2012; previously published December 2013.

The purpose of this Specification is to promote commonality among implementations by defining common representations and conventions of equipment metadata based on SEMI E125 Specification for Equipment Self-Description.

The scope of this Specification includes:

  • Common approaches for defining specific elements of equipment metadata

  • The metadata representation of selected SEMI Communication Standards, including those widely used in 300 mm semiconductor factories

This Specification defines equipment metadata based on SEMI E125-0710 and SEMI E120-0310.

This Specification applies only to production equipment that act on substrates.

Referenced SEMI Standards

SEMI E30 — Generic Model for Communications and Control of Manufacturing Equipment (GEM)
SEMI E39 — Object Services Standard: Concepts, Behavior, and Services
SEMI E40 — Standard for Processing Management
SEMI E87 — Specification for Carrier Management (CMS)
SEMI E90 — Specification for Substrate Tracking
SEMI E94 — Specification for Control Job Management
SEMI E116 — Specification for Equipment Performance Tracking (EPT)
SEMI E120 — Specification for the Common Equipment Model (CEM)
SEMI E125 — Specification for Equipment Self-Description (EqSD)
SEMI E128 — Specification for XML Message Structures
SEMI E132 — Specification for Equipment Client Authentication and Authorization
SEMI E134 — Specification for Data Collection Management (DCM)
SEMI E138 — XML Semiconductor Common Components
SEMI E145 — Classification for Measurement Unit Symbols in XML
SEMI E148 — Specification for Time Synchronization and Definition of the TS-Clock Object
SEMI E157 — Specification for Module Process Tracking

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