SEMI E167 - Specification for Equipment Energy Saving Mode Communications (EESM)
This Standard was technically approved by the Information & Control Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on August 22, 2013. Available at www.semiviews.org and www.semi.org in December 2013.
The purpose of this Specification is to define messaging and behavior to facilitate a reduced rate of energy consumption in production equipment. A mechanism is provided for the factory system (host) to initiate (and terminate) an equipment energy saving mode.
This Standard defines message services and behavior between the host and production equipment to facilitate a reduced rate of energy consumption in the production equipment.
This Standard addresses:
- Definition of Equipment Energy Saving Mode Communications behavior in the form of a state model
- Specification of message services and content for the communication needed to manage Equipment Energy Saving Mode Communications
SEMI E167.1-1213 - Specification for SECS-II Protocol for Equipment Energy Saving Mode Communications
Referenced SEMI Standards
SEMI E5 — SEMI Equipment Communications Standard 2 Message Content (SECS-II)
SEMI E30 — Generic Model for Communications and Control of Manufacturing Equipment (GEM)
SEMI S23 — Guide for Conservation of Energy, Utility and Materials Used by Semiconductor Manufacturing Equipment