SEMI E168 - Specification for Product Time Measurement -

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Volume(s): Equipment Automation Software
Language: English
Type: Single Standards Download (.pdf)
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Revision: SEMI E168-0915 - Current



This Standard was technically approved by the Metrics Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on August 25, 2014. Available at and in September 2015; originally published January 2014, previously published November 2014.


NOTICE: The designation of SEMI E168 was updated during the 0915 publishing cycle to reflect the creation of SEMI E168.2 and SEMI E168.3.


The purpose of this Specification is to provide the semiconductor industry with support in the identification and elimination of product time waste in the product life cycle within the factory. The Specification describes an approach to product time measurement (PTM) which, if uniformly applied, will support the creation of results that can be compared from one production line to another.


This Specification defines a method for organizing and preprocessing factory data to support the detection and reduction of product time waste for a product unit during its time in the factory.


The method takes a user-specified time period, breaks it down into contiguous time segments, and categorizes each time segment as a type of active or wait time.


Factory events and context data are used to delineate the time segments. The output of PTM is an analysis-ready data set. Procedures for analysis of the data to identify specific product time waste are excluded from this Specification.


This Specification defines a common approach for gathering and combining data to support the reduction of cycle time through the identification and elimination of product time waste in the factory life cycle of a product unit. It is defined in a general way so that it can be applied to different domains, including different types of factories (e.g., wafer fabs, flat panel display factories) and different aspects within a factory (e.g., production equipment, automated material handling systems [AMHSs]).


PTM may be applied at the individual substrate-level or the lot-level.


Subordinate Documents:

SEMI E168.1-1114 - Specification for Product Time Measurement in GEM 300 Production Equipment

SEMI E168.2-0915 - Specification for Product Time Measurement for Material Control Systems

SEMI E168.3-0915 - Specification for Product Time Measurement for Transport



Referenced SEMI Standards

SEMI E5 — SEMI Equipment Communications Standard 2 Message Content (SECS-II)
SEMI E30 — Generic Model for Communications and Control of Manufacturing Equipment (GEM)
SEMI E40 — Standard for Processing Management
SEMI E87 — Specification for Carrier Management (CMS)
SEMI E90 — Specification for Substrate Tracking
SEMI E94 — Specification for Control Job Management
SEMI E148 — Specification for Time Synchronization and Definition of the TS-Clock Object
SEMI E151 — Guide for Understanding Data Quality
SEMI E157 — Specification for Module Process Tracking
SEMI E160 — Specification for Communication of Data Quality
SEMI E164 — Specification for EDA Common Metadata

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