SEMI E168 - Specification for Product Time Measurement -

Abstract

The purpose of this Specification is to provide the semiconductor industry with support in the identification and elimination of product time waste in the product life cycle within the factory. The Specification describes an approach to product time measurement (PTM) which, if uniformly applied, will support the creation of results that can be compared from one production line to another.

This Specification defines a method for organizing and preprocessing factory data to support the detection and reduction of product time waste for a product unit during its time in the factory.

The method takes a user-specified time period, breaks it down into contiguous time segments, and categorizes each time segment as a type of active or wait time.

Factory events and context data are used to delineate the time segments. The output of PTM is an analysis-ready data set. Procedures for analysis of the data to identify specific product time waste are excluded from this Specification.

This Specification defines a common approach for gathering and combining data to support the reduction of cycle time through the identification and elimination of product time waste in the factory life cycle of a product unit. It is defined in a general way so that it can be applied to different domains, including different types of factories (e.g., wafer fabs, flat panel display factories) and different aspects within a factory (e.g., production equipment, automated material handling systems [AMHSs]).

PTM may be applied at the individual substrate-level or the lot-level.

Subordinate Standards (included)

SEMI E168.1 — Specification for Product Time Measurement in GEM 300 Production Equipment

SEMI E168.2 — Specification for Product Time Measurement for Material Control Systems

SEMI E168.3 — Specification for Product Time Measurement for Transport

Referenced SEMI Standards (purchase separately)

SEMI E10 — Specification for Definition and Measurement of Equipment Reliability, Availability, and Maintainability (RAM)

SEMI E151 — Guide for Understanding Data Quality

Revision History

SEMI E168-0915 (Reapproved 0923)

SEMI E168-0915 (designation update)

SEMI E168-1114 (complete rewrite)

SEMI E168-0114 (first published)

SEMI E168.1-1114 (Reapproved 0923)

SEMI E168.1-1114 (complete rewrite)

SEMI E168.1-0114 (first published)

SEMI E168.2-0915 (Reapproved 0923)

SEMI E168.2-0915 (first published)

SEMI E168.3-0915 (Reapproved 0923)

SEMI E168.3-0915 (first published)

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