SEMI E169 - Guide for Equipment Information System Security -

Abstract

The purpose of this Standard is to establish a common basis for equipment information system security. This can be shared among users and suppliers of semiconductor manufacturing equipment, suggesting concepts, and measures of information security.

This Standard is expected to:

• Provide guidelines of applying appropriate security measures for equipment to optimize cost, delivery, and reliability.
• Make the design of user security systems easier and more robust by providing knowledge of the role and responsibility of equipment in the factory.
• Provide a common language to express the needs and evaluation methods of, and gain a consistent understanding within, the industry.

Promote an open standard to provide a portable and interoperable implementation.

This Standard covers the domain of semiconductor manufacturing equipment operation.

The domain includes:

Entities (person, process, system) that interact with the equipment, Data objects of the equipment operation, and Embedded information system components inside the equipment.

Entities external to the equipment domain (e.g., factory or company) will be addressed only when that entity is related to the equipment information security.

This Standard addresses the following subjects in the creation of guidelines for information security related to equipment operation:

• The goal of information security (Confidentiality, Integrity, Availability)
• Assets to be secured (Equipment Information Asset)
• Roles to be supported by the equipment information system
• Significant security requirements (e.g., malware protection, illegal access protection on networks, local operation, hardware, disposing of components, etc.)

Referenced SEMI Standards (purchase separately)

SEMI E5 — Specification for SEMI Equipment Communication Standard 2 Message Content (SECS-II)

SEMI E30 — Specification for Generic Model for Communication and Control of Manufacturing Equipment (GEM)

SEMI E37 — Specification for High-Speed SECS Message Service (HSMS) Generic Services

SEMI E90 — Specification for Substrate Tracking

SEMI E116 — Specification for Equipment Performance Tracking

SEMI E132 — Specification for Equipment Client Authentication and Authorization

Revision History

SEMI E169-0623 (technical revision)

SEMI E169-0615 (technical revision)

SEMI E169-0414 (first published)

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