SEMI E172 - Specification for SECS Equipment Data Dictionary (SEDD)

Volume(s): Equipment Automation Software
Language: English
Type: Single Standards Download (.pdf)

This Standard was technically approved by the Information & Control Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on August 18, 2017. Available at and in January 2018; originally published January 2015; previously published October 2015.


E This Standard was editorially modified in October 2018 to correct an error. A change was made to ¶ 9.3.1.


The purpose of this Specification is to define the format and content of a dataset that describes key elements of the SECS-II interface for any production equipment. This is a type of documentation, called the SECS Equipment Data Dictionary (SEDD). It is primarily intended as a means for an equipment supplier to provide such documentation to its customers. The customers are expected to use this documentation to streamline the development of the factory software that communicates with the production equipment.


This Specification is not intended to eliminate the need for traditional paper (or equivalent) equipment interface documentation. This is a supplement to that documentation.


The SEDD is intended to be a data set that documents key elements of a SECS-II interface. The form in which this data is provided is intended to be comprehensible to both humans and software applications.


Referenced SEMI Standards

SEMI E5 — Specification for SEMI Equipment Communications Standard 2 Message Content (SECS-II)
SEMI E30 — Specification for the Generic Model for Communications and Control of Manufacturing Equipment (GEM)
SEMI E40 — Standard for Processing Management
SEMI E90 — Specification for Substrate Tracking
SEMI E125 — Specification for Equipment Self Description (EqSD)
SEMI E164 — Specification for EDA Common Metadata
SEMI E173 — Specification for XML SECS-II Message Notation (SMN)

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