SEMI E172 - Specification for SECS Equipment Data Dictionary (SEDD) -

Abstract

* This Standard has the option to purchase the Current document with a Redline document (Current + Redline). The Redline document is included with the Current document as a comparison tool to help identify changes that have been made between the Current version and the previous version (Superseded). If differences should exist between the Redline document and the Current document, the Current version is the official and authoritative version.

The purpose of this Specification is to define the format and content of a dataset that describes key elements of the SECS-II interface for any production equipment. This is a type of documentation, called the SECS Equipment Data Dictionary (SEDD). It is primarily intended as a means for an equipment supplier to provide such documentation to its customers. The customers are expected to use this documentation to streamline the development of the factory software that communicates with the production equipment.
 

This Specification is not intended to eliminate the need for traditional paper (or equivalent) equipment interface documentation. This is a supplement to that documentation.
 

The SEDD is intended to be a data set that documents key elements of a SECS-II interface. The form in which this data is provided is intended to be comprehensible to both humans and software applications.

Referenced SEMI Standards (purchase separately)
SEMI E5 — Specification for SEMI Equipment Communications Standard 2 Message Content (SECS-II)
SEMI E30 — Specification for the Generic Model for Communications and Control of Manufacturing Equipment (GEM)
SEMI E40 — Specification for Processing Management
SEMI E87 — Specification for Carrier Management (CMS)
SEMI E90 — Specification for Substrate Tracking
SEMI E116 — Specification for Equipment Performance Tracking
SEMI E125 — Specification for Equipment Self Description (EqSD)
SEMI E157 — Specification for Module Process Tracking
SEMI E164 — Specification for EDA Common Metadata
SEMI E173 — Specification for XML SECS-II Message Notation (SMN)

Revision History
SEMI E172-0225 (technical revision)
SEMI E172-1023 (technical revision)
SEMI E172-0118E (editorial revision)
SEMI E172-0118 (technical revision)
SEMI E172-1015 (technical revision)
SEMI E172-0115 (first published)

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