SEMI E173 - Specification for XML SECS-II Message Notation (SMN)

Volume(s): Equipment Automation Software
Language: English
Type: Single Standards Download (.pdf)

This Standard was technically approved by the Information & Control Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on January 5, 2015. Available at and in April 2015.


E This Standard was editorially modified in October 2018 to correct an error. A change was made to § 7.2.


The content of SECS-II messages are defined in SEMI Standard E5, SEMI Equipment Communication Standards 2 Message Content (SECS-II). SECS-II messages can be transmitted to and from and equipment using either the protocol defined in SEMI E4, Equipment Communication Standards1 Messages Transfer (SECS-I) or the protocol defined in SEMI E37 High Speed Message Transfer (HSMS) Generic Services.


The purpose of this Specification is to define a standardized notation to represent the content of SECS-II messages or the total message when SECS-II messages are sent or received using the SECS-I or HSMS protocol. SECS-II Message Notation (SMN) is intended for use when documenting and logging SECS-II messages. The notation is intended to be used when documenting the purpose, structure and sequence of SECS-II messages. The notation is also intended to be used when logging SECS-II message communication traffic.


SMN as described in this Specification standardizes an XML notation that can be used for both the logging and documentation of SECS-II messages. The rules of this notation are primarily specified using an XML schema. Any logging and documentation that comply with SMN are created in an XML format that passes SMN schema validation.


When SECS-II message transactions are logged using SMN, the XML represents the content, structure, order and additional transaction details of sent and received messages. Logging might include only the SECS-II message content. Logging might also include the protocol message header.


When documenting SECS-II messages, the XML represents the content, structure and description of the SECS-II messages. Message scenarios can also be documented to indicate the order and content of messages in a sequence. Typically, SECS-II documentation includes only the SECS-II message content. Some of the elements and attributes in the schema file are exclusively for documenting SECS-II messages.


Referenced SEMI Standards

SEMI E4 — Specification for SEMI Equipment Communication Standard 1 Message Transfer (SECS-I)
SEMI E5 — Specification SEMI Equipment Communication Standard 2 Message Content (SECS-II)
SEMI E37 — High-Speed SECS Message Services (HSMS) Generic Services

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