SEMI E175 - Specification for Subsystem Energy Saving Mode Communication (SESMC)

Volume(s): Equipment Automation Software
Language: English
Type: Single Standards Download (.pdf)
Abstract

This Standard was technically approved by the Information & Control Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on October 17, 2016. Available at www.semiviews.org and www.semi.org in November 2016.

The purpose of this Specification is to define communication between production equipment and the subsystem to enable energy saving mode (reduced energy consumption rate) operation by using sleep level transitions. A means to manage and communicate the subsystem status is provided for the production equipment to initiate (and terminate) subsystem energy saving mode operation in a coordinated manner.

This Specification defines communication and behavior between the production equipment and each subsystem to facilitate energy saving mode operation or sleep level management.

This Specification addresses:

  • Definition of subsystem energy saving mode operation in the form of a state model.
  • Communication to manage the subsystem’s energy saving mode operation via sleep levels.

Referenced SEMI Standards

SEMI E167 — Specification for Equipment Energy Saving Mode Communication (EESM)
SEMI S23 — Guide for Conservation of Energy, Utilities and Materials Used by Semiconductor Manufacturing Equipment

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