SEMI E176 - Guide to Assess and Minimize Electromagnetic Interference (EMI) in a Semiconductor Manufacturing Environment
This Standard was technically approved by the Metrics Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on October 3, 2017. Available at www.semiviews.org and www.semi.org in October 2017.
The purpose of this Guide is to provide guidance for the assessment and minimization of electromagnetic interference (EMI) in a semiconductor manufacturing environment to improve yield, equipment availability, and test results (e.g., testing time, measurement relevance, repeatability, and accuracy).
This Guide applies to equipment and facilities provided for the purpose of manufacturing semiconductor devices (i.e., equipment in a semiconductor manufacturing environment) not otherwise in the scope of SEMI E33, including all communications and control systems; processing, metrology, inspection, and automation equipment; and information-technology equipment.
The primary focus of this Guide is on a semiconductor manufacturing environment, but this Guide may also be applied to the facilities and equipment used for manufacturing other related products (e.g., photovoltaics (PVs), flat panel displays [FPDs], disk drives, microelectromechanical systems [MEMS]).
Some terms are specialized to a semiconductor manufacturing environment.
Referenced SEMI Standards
SEMI E33 — Guide for Semiconductor Manufacturing Equipment Electromagnetic Compatibility (EMC)
SEMI E78 — Guide to Assess and Control Electrostatic Discharge (ESD) and Electrostatic Attraction (ESA) for Equipment
SEMI E129 — Guide to Assess and Control Electrostatic Charge in a Semiconductor Manufacturing Facility