SEMI E178 - Guide for EDA Freeze Version

Volume(s): Equipment Automation Software
Language: English
Type: Single Standards Download (.pdf)
Abstract

This Standard provides the guide for combining versions of the SEMI EDA Standards for the successful EDA implementation.


This Standard applies to the semiconductor manufacturing equipment applying specifications defined in the EDA Standards which apply Web Service for the message exchange.


Referenced SEMI Standards 

SEMI E120 — Specification for the Common Equipment Model (CEM)

SEMI E120.1 — XML Schema for the Common Equipment Model (CEM)

SEMI E125 — Specification for Equipment Self Description (EqSD)

SEMI E125.1 — Specification for SOAP Binding for Equipment Self Description (EqSD)

SEMI E128 — Specification for XML Message Structures

SEMI E132 — Specification for Equipment Client Authentication and Authorization

SEMI E132.1 — Specification for SOAP Binding for Equipment Client Authentication and Authorization (ECA)

SEMI E134 — Specification for Data Collection Management

SEMI E134.1 — Specification for SOAP Binding of Data Collection Management (DCM)

SEMI E138 — XML Semiconductor Common Components

SEMI E145 — Classification for Measurement Unit Symbols in XML

 

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