SEMI E179 - Specification for Protocol Buffers Common Components

Volume(s): Equipment Automation Software
Language: English
Type: Single Standards Download (.pdf)

This Document is a central location for the definition of common Protocol Buffers elements that are not specific to a single standard, but are common across multiple standards.

This Document defines the representation of Error, Data Types, Data Value Types, Unit and Operator which are considered common components. The common components are used in association with other Protocol Buffers documents generated as part of the Protocol Buffers based SEMI Standard Interface Specifications.

Referenced SEMI Standards 

SEMI E5 — Specification for SEMI Equipment Communications Standard 2 Message Content (SECS-II)

SEMI E125 — Specification for Equipment Self Description (EqSD)

SEMI E132 — Specification for Equipment Client Authentication and Authorization

SEMI E138 — Specification for XML Semiconductor Common Components

SEMI E145 — Classification for Measurement Unit Symbols in XML


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