SEMI E181 - Specification for Panel FOUP for Panel Level Packaging

Volume(s): Equipment Automation Hardware
Language: English
Type: Single Standards Download (.pdf)
Abstract

The purpose of this Document is to establish basic physical dimensions for the Panel FOUP intended to be used to transport and store panels, as specified by SEMI 3D20 for 510 mm × 515 mm panel size and 600 mm × 600 mm panel size.

 

This Document is intended to define the reference planes for the dimensions of the Panel FOUP and the panel load port.

 

This Document is intended to define a set of requirements to ensure interoperability of load ports and Panel FOUP without limiting innovative solutions.


This Document specifies the external features and dimensions of the Panel FOUP, however, individual dimensions related to panel size and number of stored panels are specified by the Subordinate Standards.

 

This Document specifies the interior exclusion volumes for supporting and restraining panels in the Panel FOUP, however, individual dimensions related to panel size and number of stored panels are specified by the Subordinate Standards.

 

This Document defines three orthogonal reference planes as references for Panel FOUP dimensions.

 

Subordinate Standards (included)

SEMI E181.1-0321 — Specification for Panel FOUP for 510 to 515 mm Panel Size and 12 Slots

SEMI E181.2-0321 — Specification for Panel FOUP for 510 to 515 mm Panel Size and 6 Slots

SEMI E181.3-0321 — Specification for Panel FOUP for 600 to 600 mm Panel Size and 12 Slots

SEMI E181.4-0321 — Specification for Panel FOUP for 600 to 600 mm Panel Size and 6 Slots

 

Referenced SEMI Standards (purchase separately)

SEMI 3D20 — Specification for Panel Characteristics for Panel Level Packaging (PLP) Applications

SEMI E144 — Specification for RF Air Interface Between RFID Tags in Panel FOUP and RFID Reader in Semiconductor Production and Material Handling Equipment

 

Revision History

SEMI E181-0321 (first published)


SEMI E181.1-0321 (first published)


SEMI E181.2-0321 (first published)


SEMI E181.3-0321 (first published)


SEMI E181.4-0321 (first published)

 

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