SEMI E184 - Specification for 300 mm Tape Frame FOUP Load Port -

Abstract

1  Purpose
1.1  The purpose of this Specification is to define the basic interface dimensions of a load port on the semiconductor manufacturing equipment (SME), where a 300 mm Tape Frame FOUP can be loaded and unloaded. The intention of this Specification is to define a set of requirements and features to enable interoperability of load ports and Tape Frame FOUPs without limiting innovative solutions.
2  Scope
2.1  The interface specification in this Standard is driven by and intended to connect with a Tape Frame FOUP compliant to the relevant SEMI 300 mm Tape Frame FOUP Standard.
2.2  Loading and unloading is assumed to take place in semi-automated and automated mode by using any kind of system or device (i.e., person guided vehicle or overhead hoist vehicle).

Referenced Standards and Documents (purchase separately)
None.

Revision History
SEMI E184-0724 (technical revision)
SEMI E184-1221E (editorial revision)
SEMI E184-1221 (first published)

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