E18400 - SEMI E184 - Specification for 300 mm Tape Frame FOUP Load Port

Volume(s): Equipment Automation Hardware
Language: English
Type: Single Standards Download (.pdf)
Abstract

E This Standard was editorially modified in December 2021 to correct a reference error. Changes were made to Figure 14.


The purpose of this Specification is to define the basic interface dimensions of a load port on the semiconductor manufacturing equipment (SME), where a 300 mm Tape Frame FOUP can be loaded and unloaded. The intention of this Specification is to define a set of requirements and features to enable interoperability of load ports and Tape Frame FOUPs without limiting innovative solutions.


The interface specification in this Standard is driven by and intended to mate with a Tape Frame FOUP compliant to the relevant SEMI 300 mm Tape Frame FOUP Standard.

 

Loading and unloading is assumed to take place in semi-automated and automated mode by using any kind of system or device (i.e., person guided vehicle or overhead hoist vehicle).

 

Referenced SEMI Standards (purchase separately)

None.

 

Revision History

SEMI E184-1221E (editorial revision)

SEMI E184-1221 (first published)

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