SEMI E184 - Specification for 300 mm Tape Frame FOUP Load Port -
E This Standard was editorially modified in December 2021
to correct a reference error. Changes were made to Figure 14.
The purpose of this Specification is to define the basic
interface dimensions of a load port on the semiconductor manufacturing
equipment (SME), where a 300 mm Tape Frame FOUP can be loaded and unloaded. The
intention of this Specification is to define a set of requirements and features
to enable interoperability of load ports and Tape Frame FOUPs without limiting
The interface specification in this Standard is driven by
and intended to mate with a Tape Frame FOUP compliant to the relevant SEMI 300 mm
Tape Frame FOUP Standard.
Loading and unloading is assumed to take place in semi-automated
and automated mode by using any kind of system or device (i.e., person guided
vehicle or overhead hoist vehicle).
Referenced SEMI Standards (purchase separately)
SEMI E184-1221E (editorial revision)
SEMI E184-1221 (first published)
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