E18600 - SEMI E186 - Specification for Location and Dimensions for Power Connectors and Ethercat Ports in Mass Flow Controllers and Mass Flow Meters

Volume(s): Equipment Automation Hardware
Language: English
Type: Single Standards Download (.pdf)
Abstract


This Standard establishes the location and physical dimensions of mass flow controllers (MFCs) and mass flow meters (MFMs) using EtherCAT® communication protocol.


This Standard describes location and physical dimension of EtherCAT power and communication connectors used in MFCs/MFMs.

 

This Standard applies to mass flow controllers and mass flow meters used in both conventional and surface mount gas delivery systems.

 

Referenced SEMI Standards (purchase separately)

None.

 

Revision History

SEMI E186-1121 (first published)

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