E18600 - SEMI E186 - Specification for Location and Dimensions for Power Connectors and Ethercat Ports in Mass Flow Controllers and Mass Flow Meters
This Standard establishes the location and physical dimensions of mass flow controllers (MFCs) and mass flow meters (MFMs) using EtherCAT® communication protocol.
This Standard describes location and physical dimension of EtherCAT power and communication connectors used in MFCs/MFMs.
This Standard applies to mass flow controllers and mass flow meters used in both conventional and surface mount gas delivery systems.
Referenced SEMI Standards (purchase separately)
SEMI E186-1121 (first published)
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