E18600 - SEMI E186 - Specification for Location and Dimensions for Power Connectors and Ethercat Ports in Mass Flow Controllers and Mass Flow Meters

Volume(s): Equipment Automation Hardware
Language: English
Type: Single Standards Download (.pdf)

This Standard establishes the location and physical dimensions of mass flow controllers (MFCs) and mass flow meters (MFMs) using EtherCAT® communication protocol.

This Standard describes location and physical dimension of EtherCAT power and communication connectors used in MFCs/MFMs.


This Standard applies to mass flow controllers and mass flow meters used in both conventional and surface mount gas delivery systems.


Referenced SEMI Standards (purchase separately)



Revision History

SEMI E186-1121 (first published)

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