E18700 - SEMI E187 - Specification for Cybersecurity of Fab Equipment

Volume(s): Equipment Automation Software
Language: English
Type: Single Standards Download (.pdf)

This Standard defines overarching and fundamental cybersecurity requirements as a baseline to secure semiconductor fab equipment by design and support security protection in operation and maintenance.


This Standard intends to be applied by entities who provide equipment or services to semiconductor fabrication plants such as equipment suppliers and system integrators.


This Standard addresses required measures for cybersecurity in the design, operation, and maintenance of semiconductor production equipment and automated material handling system.


This Standard provides fundamental requirements in the following aspects:

  • Operating system (OS) support,
  • Network security,
  • Endpoint protection, and
  • Security monitoring.


This Standard applies to computing devices of fab equipment, which are installed with Microsoft Windows® or Linux® operating system.


This Standard does not apply to computing devices of programmable logic controllers (PLCs), supervisory control and data acquisition (SCADA), and devices connected to them via sensor-actuator networks.


Referenced SEMI Standards (purchase separately)

SEMI E169 — Guide for Equipment Information System Security


Revision History

SEMI E187-0122 (first published)

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