SEMI E188 - Specification for Malware Free Equipment Integration -
The nature of semiconductor manufacturing supply chains
requires standards for mitigating potential threats. By preventing the
introduction of external threats into the manufacturing ecosystem, device
manufacturers and equipment suppliers will benefit from clear mutual
expectations and improved equipment reliability and uptime.
This Standard provides a framework for how to mitigate the
propagation of malware to manufacturing facilities during capital equipment
delivery and support activities.
This Standard addresses the required measures for
information security in manufacturing equipment delivery, installation, and
support activities over the course of the manufacturing equipment life cycle
within semiconductor manufacturing facilities.
This Standard defines protection systems and processes that
ensure the integrity of manufacturing equipment, specifically defining the
- Controlling access to manufacturing equipment via networks, removable media, etc.
- Manufacturing equipment installation
- Manufacturing equipment upgrade and support tasks
- Manufacturing equipment restoration, such as hard disk drives (HDD) or computer component replacement
This Standard applies to equipment suppliers, equipment
users, and hardware and software component suppliers. This Standard applies to
any computing device (e.g., computers, controllers, programmable logic controllers
This Standard applies to any computing devices and systems
located in a manufacturing facility used in the production of semiconductors.
This includes process, metrology, and material handling equipment. Computing
devices provided by the factory, such as manufacturing execution system (MES), material
control system MCS, Host Systems etc., are excluded from this Standard.
Referenced SEMI Standards (purchase separately)
SEMI E188-0222 (first published)
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