SEMI E189 - Specification for Equipment Management of Consumables and Durables (EMCD) -

Abstract

^E This Standard was editorially modified to correct a publication error. A correction was made to Figure 1.

This Specification provides a standardized behavior for host communication with manufacturing equipment during the removal, installation and usage of consumables and durables.
 

This Specification defines objects and state models that define the interaction between the host and equipment in the following scenarios:
• Durable removal, installation, and verification
• Durable location state changes and status
• Consumable removal, installation, and verification
• Consumable location state changes and status
• Durable usage
• Consumable usage

Subordinate Standards (included)
SEMI E189.1 — Specification for SECS-II Protocol for Equipment Management of Consumables and Durables (EMCD)

Referenced SEMI Standards (purchase separately)
SEMI E39 — Specification for Object Services: Concepts, Behavior, and Services

Revision History
SEMI E189-0524 (first published)

SEMI E189.1-0524 (first published)

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