SEMI E190 - Specification for Equipment Data Publication (EDP) -

Abstract

NOTICE: By purchasing this download, you will receive the Primary Standard and the Subordinate Standard.

1  Purpose
1.1  The purpose of this Specification is to provide a framework to equipment suppliers on how equipment data is categorized for specific component types and the minimum set of data required for that component type.
2  Scope
2.1  This Specification defines equipment data concepts, shareable and nonshareable data concepts and category levels concepts used to organize equipment data that is accessible from an Equipment Data Publication (EDP) Component type.

Subordinate Standard (included)
SEMI E190.1 — Specification for Common Data for Etch Components

Referenced SEMI Standards (purchase separately)
None.

Revision History
SEMI E190-1124 (first published)

SEMI E190-1124 (first published)

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