SEMI E190.1 - Specification for Common Data for Etch Components -

Abstract

NOTICE: By purchasing this download, you will receive the Primary Standard, SEMI E191 and the Subordinate Standard, SEMI E191.1. If you purchase this download, you do not need to purchase the SEMI E191 download.

1  Purpose
1.1  This Specification provides an implementation mapping of SEMI E190 Equipment Data Publication (EDP) Level Categories to Etch Components.
2  Scope
2.1  This Specification is the faithful representation of level categories with respect to Etch Components. It does not add new concepts to the SEMI E190 model.

Primary Standard (included)
SEMI E190 — Specification for Equipment Data Publication (EDP)

Referenced SEMI Standards (purchase separately)
None.

Revision History
SEMI E190-1124 (first published)

SEMI E190.1-1124 (first published)

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