SEMI E192 - Guide for Equipment Adoption Criteria for GEM and GEM-related Standards -

Abstract

1  Purpose
1.1  This Standard provides general guidance for implementing the SEMI E30 (GEM) Standard. It also provides general guidance for implementing the many standards built using the GEM and SEMI E5 (SECS-II) Standards.
2  Scope
2.1  This Standard applies to any manufacturing equipment that implement the GEM Standard and any of the Standards built on GEM and SECS-II technology.
2.2  This Standard is not limited to any specific industry. The guidelines are intended to be universal.

Referenced SEMI Standards (purchase separately)
SEMI A3 — Specification for Printed Circuit Board Equipment Communication Interfaces (PCBECI)
SEMI E4 — Specification for SEMI Equipment Communications Standard 1 Message Transfer (SECS-I)
SEMI E5 — Specification for SEMI Equipment Communications Standard 2 Message Content (SECS-II)
SEMI E10 — Specification for Definition and Measurement of Equipment Reliability, Availability, and Maintainability (RAM) and Utilization
SEMI E30 — Specification for the Generic Model for Communications and Control of Manufacturing Equipment (GEM)
SEMI E30.1 — Specification for Inspection and Review Specific Equipment Model (ISEM)
SEMI E30.5 — Specification for Metrology Specific Equipment Model (MSEM)
SEMI E32 — Material Movement Management (MMM)
SEMI E32.1 — SECS-II Support for Material Movement
SEMI E37 — Specification for High-Speed SECS Message Services (HSMS) Generic Services
SEMI E37.1 — Specification for High-Speed SECS Message Service General Session (HSMS-SS or HSMS-SSS)
SEMI E37.2 — Specification for High-Speed SECS Message Service Single Selected-Session Mode (HSMS-GS)
SEMI E39 — Specification for Object Services: Concepts, Behavior, and Services
SEMI E39.1 — Specification for SECS-II Protocol for Object Services (OSS)
SEMI E40 — Specification for Processing Management
SEMI E40.1 — Specification for SECS-II Protocol for Processing Management
SEMI E41 — Exception Management (EM) Standard
SEMI E41.1 — SECS-II Support for Exception Management Standard
SEMI E42 — Recipe Management Standard: Concepts, Behavior, and Message Services
SEMI E42.1 — Standard for SECS-II Protocol for Recipe Management Standards (RMS)
SEMI E53 — Event Reporting
SEMI E53.1 — SECS-II Support for Event Reporting Standard
SEMI E58 — Automated Reliability, Availability, and Maintainability Standard (ARAMS): Concepts, Behavior and Services
SEMI E58.1 — SECS-II Protocol for Automated Reliability, Availability, and Maintainability Standard (ARAMS): Concepts, Behavior and Services
SEMI E82 — Specification for Interbay/Intrabay AMHS SEM (IBSEM)
SEMI E84 — Specification for Enhanced Carrier Handoff Parallel I/O Interface
SEMI E87 — Specification for Carrier Management (CMS)
SEMI E87.1 — Specification for SECS-II Protocol for Carrier Management (CMS)
SEMI E88 — Specification for AMHS Storage SEM (Stocker SEM)
SEMI E90 — Specification for Substrate Tracking
SEMI E90.1 — Specification for SECS-II Protocol Substrate Tracking
SEMI E91 — Specification for Prober Specific Equipment Model (PSEM)
SEMI E94 — Specification for Control Job Management
SEMI E94.1 — Specification for SECS-II Protocol for Control Job Management (CJM)
SEMI E99 — Specification for Carrier ID Reader/Writer
SEMI E99.1 — Specification for SECS-I and SECS-II Protocol for Carrier ID Reader/Writer
SEMI E109 — Specification for Reticle and Pod Management (RPMS)
SEMI E109.1 — Specification for SECS-II Protocol for Reticle and Pod Management (RPMS)
SEMI E116 — Specification for Equipment Performance Tracking
SEMI E116.1 — Specification for SECS-II Protocol for Equipment Performance Tracking
SEMI E118 — Specification for Wafer ID Reader Communication Interface – The Wafer ID Reader Functional Standard: Concepts, Behavior and Service
SEMI E118.1 — Specification for SECS-I and SECS-II Protocol for Wafer ID Reader Communication Interface Standards
SEMI E122 — Specification for Tester Equipment Specific Model (TSEM)
SEMI E122.1 — Specification for SECS-II Protocol for Tester Specific Equipment Model (TSEM)
SEMI E123 — Specification for Handler Equipment Specific Equipment Model (HSEM)
SEMI E123.1 — Specification for SECS-II Protocol for Handler Specific Equipment Model (HSEM)
SEMI E127 — Specification for Integrated Measurement Module Communications: Concepts, Behavior and Services (IMMC)
SEMI E127.1 — Specification for SECS-II Protocol for Integrated Measurement Module Communications (IMMC)
SEMI E130 — Specification for Prober Specific Equipment Model for 300 mm Environment (PSEM300)
SEMI E130.1 — Specification for SECS-II Protocol for Prober Specific Equipment Model for 300 mm Environment (PSEM300)
SEMI E139 — Specification for Recipe and Parameter Management (RaP)
SEMI E139.1 — XML Schema for the RaP PDE
SEMI E139.2 — SECS-II Protocol for Recipe and Parameter Management (RaP)
SEMI E142 — Specification for Substrate Mapping
SEMI E142.1 — Specification for XML Schema for Substrate Mapping
SEMI E142.2 — Specification for SECS-II Protocol for Substrate Mapping
SEMI E142.4 — Specification for SECS-II Protocol for Substrate Mapping using Item Transfer
SEMI E148 — Specification for Time Synchronization and Definition of the TS-Clock Object
SEMI E153 — Specification for AMHS SEM (AMHS SEM)
SEMI E157 — Specification for Module Process Tracking
SEMI E167 — Specification for Equipment Energy Savings Mode Communications (EESM)
SEMI E167.1 — Specification for SECS-II Protocol for Equipment Energy Savings Mode Communications
SEMI E170 — Specification for Secured Foundation of Recipe Management Systems (SFORMS)
SEMI E170.1 — Specification for SECS-II Protocol for Secured Foundation of Recipe Management System
SEMI E171 — Specification for Predictive Carrier Logistics (PCL)
SEMI E171.1 — Specification for SECS-II Protocol for Predictive Carrier Logistics
SEMI E172 — Specification for SECS Equipment Data Dictionary (SEDD)
SEMI E173 — Specification for XML SECS-II Message Notation (SMN)
SEMI E189 — Specification for Equipment Management of Consumables and Durables (EMCD)
SEMI E189.1 — Specification for SECS-II Protocol for Equipment Management of Consumables and Durables (EMCD)
SEMI HB4 — Specification of Communication Interfaces for High Brightness LED Manufacturing Equipment (HB-LED ECI)
SEMI PV2 — Guide for PV Equipment Communication Interfaces (PVECI)

Revision History
SEMI E192-0125 (first published)

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