SEMI E194 - Guide to Using a Liquid Particle Counter to Assess Particulate Surface Contamination on Critical Chamber Components and Coupons -

Abstract

1 Purpose
1.1  This Guide describes analytical methods for determining the extractable surface particles from a critical chamber component (CCC) or a coupon by using ultrasonic-aided, deionized water (DIW) extraction followed by using a liquid particle counter (LPC).
1.2  This Guide is intended to promote communication among the relevant parties (e.g., processing equipment users, processing equipment manufacturers, CCC manufacturers, cleaning-service providers, testing laboratories). This Guide also can be used to facilitate better communication regarding particle-level expectation among the users. processing equipment manufacturers, the CCC manufacturers, and the cleaning suppliers.
1.3  The intended use of this Guide is to ensure consistency in the measuring and reporting of results provided by each processing equipment manufacturer or CCC manufacturer.

2  Scope
2.1  This Guide applies to measurements of particles on CCCs (e.g., showerheads, pedestals, weldments, optical housings) or coupons by using ultrasonic-aided, DIW extraction followed by LPC analysis.

Referenced SEMI Standards (purchase separately)
None.

Revision History
SEMI E194-0725 (first published) 

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