SEMI E196 - Guide for Equipment Edge Data Governance -

Abstract

1  Purpose
1.1  Provide guidance on how to identify equipment data about the manufacturing equipment that the equipment supplier provides that can be used in equipment engineering or analysis applications.
1.2  To share best practices on how to access equipment data provided by the manufacturing equipment and external computing devices provided by the equipment supplier, and identify changes to the equipment data that may impact software applications that use it.
2  Scope
2.1  This Guide describes how equipment suppliers can document equipment data accessible on the manufacturing equipment, and how they can document metadata for local data sources (e.g., log files and databases).
2.2  This Guide describes how equipment suppliers can incorporate data access security and apply data latency concepts with Equipment Edge Computing Systems.
2.3  This Guide is intended for equipment edge data that equipment users can collect from the manufacturing equipment. It may also apply to equipment edge data used to control the manufacturing equipment (e.g., recipe parameters specified by a factory host that the manufacturing equipment uses to set up for its expected operation or activity).

Referenced SEMI Standards (purchase separately)
SEMI E125 — Specification for Equipment Self-Description (EqSD)
SEMI E132 — Specification for Equipment Client Authentication and Authorization
SEMI E151 — Guide for Understanding Data Quality
SEMI E172 — Specification for SECS Equipment Data Dictionary (SEDD)
SEMI E187 — Specification for Cybersecurity of Fab Equipment
SEMI E190 — Specification for Equipment Data Publication (EDP)

Revision History
SEMI E196-0925 (first published)

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