SEMI E197 - Specification for Large Tray Stack FOUP (LTSF) -

Abstract

NOTICE: This is a Preliminary Standard. Preliminary Standards are approved for publication by a single chapter of a technical global committee for information and comment prior to letter balloting for its adoption as a Full-consensus Standard. Preliminary Standards are published for a period of no more than two years, unless a publication extension is granted by the International Standards Committee. This Preliminary Standard will be removed from publication, and will no longer be available for purchase, during the February 2028 (0228) publication cycle. Suggestions for improvements should be submitted to the Physical Interfaces & Carriers Global Technical Committee or Standards staff.

NOTICE: This Standard does not follow normal formatting rules; it is being published with colored text in Table 1.

1  Purpose
1.1  The purpose of this Specification is to establish basic physical dimensions for the large tray stack FOUP (LTSF) intended to be used to transport and store JEDEC BX trays, as specified by DR-4.10F.
1.2  This Specification is intended to define the reference planes for the dimensions of the LTSF and SEMI E182 load port.
1.3  This Specification is intended to define a set of requirements to ensure interoperability of load ports and LTSF without limiting innovative solutions.
1.4  This Preliminary Standard includes an Option A and an Option B for two LTSF internal dimensions. The intent is to align on one option based on empirical testing.
2  Scope
2.1  This Standard specifies the external features and dimensions of the LTSF.
2.2  This Standard specifies the interior exclusion volumes for supporting and restraining trays in the LTSF.
2.3  This Standard defines three orthogonal reference planes as references for LTSF dimensions.
NOTICE: SEMI Standards and Safety Guidelines do not purport to address all safety issues associated with their use. It is the responsibility of the users of the Documents to establish appropriate safety and health practices, and determine the applicability of regulatory or other limitations prior to use.

Referenced SEMI Standards (purchase separately)
SEMI E144 — Specification for RF Air Interface Between RFID Tags in Carriers and RFID Readers in Semiconductor Production and Material Handling Equipment
SEMI E182 — Specification for Panel FOUP Loadport for Panel Level Packaging

Revision History
SEMI E197-0226 (Preliminary) (first published)

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