SEMI E199 - Specification for 300 mm Film Frame FOUP (FFF) Load Port -

Abstract

NOTICE: This Standard does not follow normal formatting rules; it is being published with colored text in Table 3.

1  Purpose
1.1  This Specification defines the dimensional requirements for 300 mm film frame FOUP (FFF) load ports used in semiconductor manufacturing. It is intended to provide a uniform physical interface between the FFF, the equipment, and the factory to facilitate the use of automated material handling systems. The specification also ensures that the load port meets ergonomic requirements for manually loaded equipment.
2  Scope
2.1  This Specification defines the dimensional and interface requirements for load ports that accommodate 300 mm film frame FOUPs specified by SEMI E193. This includes load port interface dimensions, kinematic coupling (KC) pin and interface dimensions, the carrier door opening interface (FIMS), and the interface between the load port and the equipment (BOLTS) as well as load port indicator light positions.
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Referenced SEMI Standards (purchase separately)
SEMI E15.1 — Specification for 300 mm Tool Load Port
SEMI E57 — Specification for Kinematic Couplings Used to Align and Support 300 mm Wafer Carriers
SEMI E62 — Specification for 300 mm Front-Opening Interface Mechanical Standard (FIMS)
SEMI E63 — Specification for 300 mm Box Opener/Loader to Tool Standard (BOLTS-M) Interface
SEMI E64 — Specification for 300 mm Cart to SEMI E15.1 Docking Interface Port
SEMI E84 — Specification for Enhanced Carrier Handoff Parallel I/O Interface
SEMI E110 — Guideline for Indicator Placement Zone and Switch Placement Volume of Load Port Operation Interface for 300 mm Load Ports
SEMI E193 — Specification for 300 mm Film Frame FOUP (FFF)
NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.

Revision History
SEMI E199-0626 (first published)

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