SEMI E201 - Specification for Enhanced Handoff Interface -

Abstract

1 Purpose
1.1 This Standard establishes requirements for control of automated material handoffs, primarily within semiconductor manufacturing environments. It aims to enable interoperability, reliability, and efficiency in the transfer of materials between various systems or entities, including automated material handling systems (AMHS), processing equipment, and robotic systems.
2 Scope
2.1 This Standard provides the core framework for defining and managing the signals used in material handoffs between equipment.
2.2 This Specification is limited to the interface signals associated with automated material handoff operations between an active entity (physically delivering or removing the material) and a passive entity (receiving or providing the material) and how those signals are used to hand off materials between the equipment, including:
• Signal definitions,
• Material handoff sequence definitions and time diagrams, and
• Related error indication, detection, and recovery.
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Subordinate Standards (included)
SEMI E201.1-1026 (Preliminary) — Specification for Modbus Communication for Enhanced Handoff Interface

Referenced SEMI Standards (purchase separately)
SEMI E82 — Specification for Interbay/Intrabay AMHS SEM (IBSEM)
SEMI E84 — Specification for Enhanced Carrier Handoff Parallel I/O Interface
SEMI E87 — Specification for Carrier Management (CMS)
NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.

Revision History
SEMI E201-1026 (Preliminary) (first published)

SEMI E201.1-1026 (Preliminary) (first published)

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